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公开(公告)号：US20190285801A1
公开(公告)日：2019-09-19
申请号：US16354414
申请日：2019-03-15
申请人： Finisar Sweden AB
IPC分类号： G02B6/136
摘要： A method of manufacturing an integrated semiconductor optical waveguiding device comprising an elongated waveguide, the method comprising: providing a material stack comprising a substrate layer, an anisotropically wet etchable conductive layer, a waveguiding core layer, an etch-guiding layer between the substrate layer and the waveguiding core layer, and InP material between the etch-guiding layer and the waveguiding core layer; etching said material stack down to and including said waveguiding core layer, to form an elongated shape of the elongated waveguide together with an etched area laterally beside the waveguide; providing an etch mask material across the formed waveguide; and wet etching parts of said etched areas that are not protected by the etch mask, to remove material of the etch-guiding layer across a lateral direction of the waveguide, forming a laterally extending through tunnel in the etch-guiding layer and in the conductive layer.
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公开(公告)号：US09885828B2
公开(公告)日：2018-02-06
申请号：US14730959
申请日：2015-06-04
申请人： Finisar Sweden AB
发明人： David Adams , Per Granestrand
CPC分类号： G02B6/122 , G02B6/136 , G02B6/26 , G02B6/4207 , G02B2006/1209 , G02B2006/12097 , G02B2006/12147 , G02B2006/12159 , H01S3/0064
摘要： Optical waveguiding part (300), which waveguiding part is arranged to convey light through an output facet (30) of the waveguiding part, which waveguiding part comprises a ridge waveguide comprising a semiconductor substrate (320) and a semiconductor light-conveying ridge, wherein the output facet is set at an angle (α) in relation to a main direction (z) of light along the said waveguide, so that light travelling in the waveguide along said main direction has an angle of incidence towards the facet of between 2° and 14° and is reflected towards a first side (301) of the said ridge, wherein the waveguide comprises an MMI (Multi Mode Interferometer) (310), arranged to create an output image substantially at the output facet.
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公开(公告)号：US11114819B2
公开(公告)日：2021-09-07
申请号：US16555363
申请日：2019-08-29
申请人： Finisar Sweden AB
IPC分类号： H01S5/042
摘要： A semiconductor laser chip-on-carrier (CoC) device comprising: a semiconductor laser component comprising an electric laser terminal; a driver circuit for producing on an electric driver terminal an alternating current electric driving signal; and an electric signal conductor electrically connecting the driver terminal to the laser terminal, wherein the electric signal conductor comprises: a first printed trace which is not arranged on the semiconductor laser component and which comprises a first trace elongated section and a first trace downstream terminal section; and a first wire bond, connecting the first trace downstream terminal section to the laser terminal, and wherein the first trace elongated section is adapted to the semiconductor laser component such that the first trace elongated section and an internal capacitance of the semiconductor is laser component together correspond to an impedance which is at the most 20% from an output impedance of an output terminal of the driver circuit.
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公开(公告)号：US20180335681A1
公开(公告)日：2018-11-22
申请号：US15980707
申请日：2018-05-15
申请人： Finisar Sweden AB
IPC分类号： G02F1/225 , H04B10/079
CPC分类号： G02F1/225 , G02F2001/212 , G02F2001/217 , H04B10/0795 , H04B10/5053
摘要： An optical interference modulator comprises a main input, a main output, an optical splitter connected to the main input, first and second MMI couplers, each with a first primary-end access port connected to the splitter; a second primary-end access port connected to the main output; a first secondary-end access port connected to a respective primary wave-guide; and a second secondary-end access port connected to a respective secondary wave-guide. A light reflector is arranged to reflect light incident from said primary and secondary waveguides back into the same respective waveguide such that light travelling through the respective waveguide from the respective secondary-end access port, after reflection, travels back to the same secondary-end access port. For the MMI couplers, at least one of the respective primary and secondary waveguides comprises a respective light phase modulating device arranged to modulate the phase of light travelling along the corresponding waveguide in either direction.
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公开(公告)号：US10605989B2
公开(公告)日：2020-03-31
申请号：US16354414
申请日：2019-03-15
申请人： Finisar Sweden AB
IPC分类号： G02B6/136 , G02B6/12 , H01L27/146 , H01L31/0304
摘要： A method of manufacturing an integrated semiconductor optical waveguiding device comprising an elongated waveguide, the method comprising: providing a material stack comprising a substrate layer, an anisotropically wet etchable conductive layer, a waveguiding core layer, an etch-guiding layer between the substrate layer and the waveguiding core layer, and InP material between the etch-guiding layer and the waveguiding core layer; etching said material stack down to and including said waveguiding core layer, to form an elongated shape of the elongated waveguide together with an etched area laterally beside the waveguide; providing an etch mask material across the formed waveguide; and wet etching parts of said etched areas that are not protected by the etch mask, to remove material of the etch-guiding layer across a lateral direction of the waveguide, forming a laterally extending through tunnel in the etch-guiding layer and in the conductive layer.
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公开(公告)号：US10551714B2
公开(公告)日：2020-02-04
申请号：US15980707
申请日：2018-05-15
申请人： Finisar Sweden AB
发明人： David Adams , Efthymios Rouvalis , Jan-Olof Wesström , Martin Zirngibl , Robert Lewén , Christopher Daunt
IPC分类号： G02F1/225 , H04B10/079 , G02F1/21
摘要： An optical interference modulator comprises a main input, a main output, an optical splitter connected to the main input, first and second MMI couplers, each with a first primary-end access port connected to the splitter; a second primary-end access port connected to the main output; a first secondary-end access port connected to a respective primary waveguide; and a second secondary-end access port connected to a respective secondary waveguide. A light reflector is arranged to reflect light incident from said primary and secondary waveguides back into the same respective waveguide such that light travelling through the respective waveguide from the respective secondary-end access port, after reflection, travels back to the same secondary-end access port. For the MMI couplers, at least one of the respective primary and secondary waveguides comprises a respective light phase modulating device arranged to modulate the phase of light travelling along the corresponding waveguide in either direction.
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