IN SITU INDUCTIVE ABLATION METER
    3.
    发明申请
    IN SITU INDUCTIVE ABLATION METER 审中-公开
    原位电感测量仪

    公开(公告)号:US20130206738A1

    公开(公告)日:2013-08-15

    申请号:US13761797

    申请日:2013-02-07

    Abstract: Real time monitoring and detection of the depths of laser scribes used during pulsed laser ablation processes. During a laser scribing process, sensors are used to determine in real time an amount of ablated material from a substrate undergoing the process. Laser scribing can be terminated when the amount of ablated material as detected by the sensors corresponds to a desired scribe depth.

    Abstract translation: 实时监测和检测在脉冲激光烧蚀过程中使用的激光划片的深度。 在激光划线过程中,使用传感器来实时地确定来自正在进行该工艺的衬底的消融材料的量。 当由传感器检测到的消融材料的量对应于所需的划痕深度时,可以终止激光划线。

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