公开(公告)号：US20210301387A1

公开(公告)日：2021-09-30

申请号：US17267189

申请日：2019-08-09

Applicant: First Solar, Inc.

Inventor： John Barden ,  Rick Powell ,  Aaron Roggelin ,  Nirav Vora

IPC: C23C14/22 ,  C23C14/26 ,  C23C14/56 ,  C23C16/448

Abstract: Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

公开(公告)号：US20200270744A1

公开(公告)日：2020-08-27

申请号：US16758258

申请日：2018-10-24

Applicant: First Solar, Inc.

Inventor： Zhigang Ban ,  John Barden ,  Jerry Drennan ,  Litian Liu ,  Rick Powell ,  Nirav Vora ,  Yaojun Xu

IPC: C23C14/24

Abstract: Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

公开(公告)号：US20240247363A1

公开(公告)日：2024-07-25

申请号：US18628285

申请日：2024-04-05

Applicant: First Solar, Inc.

Inventor： Zhigang Ban ,  John Barden ,  Jerry Drennan ,  Litian Liu ,  Rick Powell ,  Nirav Vora ,  Yaojun Xu

IPC: C23C14/24

CPC classification number: C23C14/243

Abstract: Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.