公开(公告)号：US20220013674A1

公开(公告)日：2022-01-13

申请号：US17279254

申请日：2019-09-23

Applicant: First Solar, Inc.

Inventor： Paulina Bourgeois ,  Robert Clark-Phelps ,  Qi Fang ,  Jing Guo ,  Gopal Mor ,  Rui Shao

IPC: H01L31/0224 ,  H01L31/18 ,  H01L31/054 ,  H01L31/073

Abstract: According to the embodiments provided herein, a method for sputtering a TCO material onto a substrate includes process conditions that produce a textured topography at the interfaces of various layers. The textured topography can include an average roughness from about 5 to about 40 nm. The process conditions can include providing oxygen in the sputtering environment at a flow rate of from 0 to about 30 sccm; or heating the substrate to at least 200; or increasing the magnetic field strength to above 40 mT. The textured topography creates interfacial transition areas which have hybrid physical properties compared to their constituent materials.