公开(公告)号：US20220404300A1

公开(公告)日：2022-12-22

申请号：US17354327

申请日：2021-06-22

申请人： Flusso Limited

发明人： Syed Zeeshan Ali ,  Cerdin Ching Ching Lee ,  Ethan Gardner ,  Jonathan Owen Hardie ,  Jonathan Sean Callan ,  Florin Udrea

IPC分类号： G01N25/18

摘要： A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising: a semiconductor substrate comprising a first etched portion and a second etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, and a second dielectric membrane located over the second etched portion of the semiconductor substrate; two temperature sensing elements on or within the first dielectric membrane and two temperature sensing elements on or within the second dielectric membrane; an output circuit configured to measure a differential signal between the two temperature sensing elements of the first dielectric membrane and the two temperature sensing elements of the second dielectric membrane; wherein the first dielectric membrane is exposed to the fluid and the second dielectric membrane is isolated from the fluid.

公开(公告)号：US11867648B2

公开(公告)日：2024-01-09

申请号：US17354327

申请日：2021-06-22

申请人： Flusso Limited

发明人： Syed Zeeshan Ali ,  Cerdin Ching Ching Lee ,  Ethan Gardner ,  Jonathan Owen Hardie ,  Jonathan Sean Callan ,  Florin Udrea

IPC分类号： G01N25/18 ,  G01N25/00 ,  G01N25/48 ,  G01N33/00

CPC分类号： G01N25/18 ,  G01N25/00 ,  G01N25/48 ,  G01N25/4873 ,  G01N25/4893 ,  G01N33/0004 ,  G01N33/0027

摘要： A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising: a semiconductor substrate comprising a first etched portion and a second etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, and a second dielectric membrane located over the second etched portion of the semiconductor substrate; two temperature sensing elements on or within the first dielectric membrane and two temperature sensing elements on or within the second dielectric membrane; an output circuit configured to measure a differential signal between the two temperature sensing elements of the first dielectric membrane and the two temperature sensing elements of the second dielectric membrane; wherein the first dielectric membrane is exposed to the fluid and the second dielectric membrane is isolated from the fluid.