公开(公告)号：US11378619B2

公开(公告)日：2022-07-05

申请号：US17111283

申请日：2020-12-03

Applicant: FormFactor, Inc.

Inventor： Masahiro Sameshima

IPC: G01R31/28 ,  G01R1/44 ,  G01R31/319

Abstract: Double-sided probe systems with thermal control systems and related methods. Thermally-controlled, double-sided probe systems include a probe assembly configured to test one or more devices under test (DUTs) of a substrate and a chuck configured to support the substrate. The probe assembly includes a thermal control system configured to at least partially control a substrate temperature of the substrate while the probe assembly tests the DUT(s). The chuck is configured to support the substrate such that the probe assembly has access to each of a first substrate side of the substrate and a second substrate side of the substrate while the substrate is operatively supported by the chuck. In some examples, methods of operating double-sided probe systems include regulating the substrate temperature with the thermal control system.

公开(公告)号：US20210190860A1

公开(公告)日：2021-06-24

申请号：US17111283

申请日：2020-12-03

Applicant: FormFactor, Inc.

Inventor： Masahiro Sameshima

IPC: G01R31/28 ,  G01R31/319 ,  G01R1/44

Abstract: Double-sided probe systems with thermal control systems and related methods. Thermally-controlled, double-sided probe systems include a probe assembly configured to test one or more devices under test (DUTs) of a substrate and a chuck configured to support the substrate. The probe assembly includes a thermal control system configured to at least partially control a substrate temperature of the substrate while the probe assembly tests the DUT(s). The chuck is configured to support the substrate such that the probe assembly has access to each of a first substrate side of the substrate and a second substrate side of the substrate while the substrate is operatively supported by the chuck. In some examples, methods of operating double-sided probe systems include regulating the substrate temperature with the thermal control system.