公开(公告)号：US5719605A

公开(公告)日：1998-02-17

申请号：US752091

申请日：1996-11-20

申请人： Frank Edward Anderson ,  Paul Albert Cook ,  Anna Catherine Cramer

发明人： Frank Edward Anderson ,  Paul Albert Cook ,  Anna Catherine Cramer

IPC分类号： B41J2/16 ,  G03F7/20 ,  B41J2/05 ,  H01L21/00

CPC分类号： G03F7/70425 ,  B41J2/1603 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1635 ,  G03F7/70433 ,  B41J2202/20

摘要： An increased resolution thermal ink jet printhead construction and method for forming large array heater chips for thermal ink jet printheads is achieved by fabricating a unitary "megachip" in which multiple cells of electrical components are defined in a plurality of columnar patterns in a plane of a silicon wafer. Cells of a first column are vertically offset from cells of an adjacent column so as to overlap the gap between cells in the first column. The megachip is then formed by grouping at least one cell from each of two adjacent columns and dicing the wafer to remove the megachip.

摘要翻译： 用于形成用于热喷墨打印头的大型阵列加热器芯片的增加的分辨率热喷墨打印头结构和方法通过制造整体的“巨型喷墨”来实现，其中多个单元的电气部件被定义在多个圆柱形图案的平面中 硅晶片。 第一列的单元与相邻列的单元垂直偏移，以便与第一列中的单元之间的间隙重叠。 然后通过对来自两个相邻列中的每一个的至少一个单元进行分组并切割晶片以除去该超音速波形而形成该超音速波形。