公开(公告)号：US20170299438A1

公开(公告)日：2017-10-19

申请号：US15399514

申请日：2017-01-05

申请人： Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.

发明人： Dirk WEILER ,  Kai-Marcel MUCKENSTURM ,  Frank HOCHSCHULZ

IPC分类号： G01J5/02 ,  G01J5/20 ,  G01J5/08 ,  G01J5/04 ,  G01J5/34

CPC分类号： G01J5/0235 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/024 ,  G01J5/046 ,  G01J5/0809 ,  G01J5/20 ,  G01J5/28 ,  G01J5/34

摘要： A radiation detector includes a substrate and a membrane suspended above the substrate by spacers, wherein the spacers electrically contact a radiation sensor formed in the membrane and thermally insulate the membrane from the substrate.

公开(公告)号：US20160320240A1

公开(公告)日：2016-11-03

申请号：US15143176

申请日：2016-04-29

申请人： Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

发明人： Dirk WEILER ,  Kai-Marcel MUCKENSTURM ,  Frank HOCHSCHULZ

IPC分类号： G01J5/20

CPC分类号： G01J5/20 ,  G01J5/023 ,  G01J5/024 ,  G01J2005/202

摘要： A radiation detector with a substrate and a membrane, which is suspended above the substrate by a spacer is described, wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate. Further, the spacer includes a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate, and a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole.

摘要翻译： 描述了具有衬底和膜的辐射检测器，其通过间隔件悬挂在衬底上方，其中间隔件将形成在膜中的辐射传感器与衬底热绝缘。 此外，间隔物包括导电并接触辐射传感器和衬底的第一极的第一层和与第一导电层导电并与之电绝缘并与第二极接触的第二层 的辐射传感器和基板，其中第二极极性与第一极极性不同。