摘要:
Hard-material-coated bodies composed of metal, cemented hard material, cermet or ceramic, coated with a TiSiCN composite layer or with a multilayer layer system which contains at least one TiSiCN composite layer. The TiSiCN composite layer is a nanocomposite layer which has been produced by a thermal CVD process without additional plasma excitation and contains a nanocrystalline phase composed of TiCxN1-x having a crystallite size in the range from 5 nm to 150 nm and a second phase composed of amorphous SiCxNy. The layer is characterized by a high hardness, a high oxidation and heat resistance and a high adhesive strength.
摘要:
Hard-material-coated bodies composed of metal, cemented hard material, cermet or ceramic, coated with a TiSiCN composite layer or with a multilayer layer system which contains at least one TiSiCN composite layer. The TiSiCN composite layer is a nanocomposite layer which has been produced by a thermal CVD process without additional plasma excitation and contains a nanocrystalline phase composed of TiCxN1-x having a crystallite size in the range from 5 nm to 150 nm and a second phase composed of amorphous SiCxNy. The layer is characterized by a high hardness, a high oxidation and heat resistance and a high adhesive strength.