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公开(公告)号:US4549238A
公开(公告)日:1985-10-22
申请号:US456641
申请日:1983-01-10
申请人: Friedrich Ertingshausen , Volker Heinrich , Holger Hinkel , Gerhard Kaus , Jurgen Kempf , Hans-Georg Nauth , Manfred Schrader
发明人: Friedrich Ertingshausen , Volker Heinrich , Holger Hinkel , Gerhard Kaus , Jurgen Kempf , Hans-Georg Nauth , Manfred Schrader
CPC分类号: G11B5/255 , G11B23/507 , G11B5/10 , G11B5/6005
摘要: A magnetic head slider consisting of a mixed ceramic made of aluminum oxide/titanium carbide has on its sliding side adjacent a magnetic record carrier a thin layer from which the titanium carbide component has been removed. The titanium carbide component preferably is removed by preferential reactive ion etching in a CF.sub.4 plasma. The magnetic head slider with its sliding surface thus modified exhibits greatly improved sliding properties compared with sliders of the same material having a non-modified sliding surface.
摘要翻译: 由氧化铝/碳化钛组成的混合陶瓷组成的磁头滑块在其滑动面上邻近磁记录载体,已经从其中除去碳化钛组分的薄层。 碳化钛组分优选通过CF4等离子体中的优先反应离子蚀刻除去。 与具有非改性滑动表面的相同材料的滑块相比,其具有如此改进的滑动表面的磁头滑块显示出大大改善的滑动性能。