FREQUENCY LOCK IN ACTIVE MEMS COOLING SYSTEMS

    公开(公告)号:US20220187033A1

    公开(公告)日:2022-06-16

    申请号:US17552290

    申请日:2021-12-15

    Abstract: A system includes an active micro-electric mechanical system (MEMS) cooling system and a drive system. The MEMS cooling system includes cooling element(s) that direct fluid toward a surface of heat-generating structure(s) when driven to vibrate by a driving signal having a frequency and an input voltage. The drive system is coupled to the active MEMS cooling system and provides the driving signal. The drive system includes a power source and a feedback controller providing a feedback signal corresponding to a proximity to a resonant state of the at least one cooling element. The drive system adjusts at least one of the frequency and the input voltage based on the feedback signal such that the frequency corresponds to the resonant state of the cooling element(s). The input voltage does not exceed a maximum safe operating voltage for the cooling element(s).

    FREQUENCY LOCK IN ACTIVE MEMS COOLING SYSTEMS

    公开(公告)号:US20240240884A1

    公开(公告)日:2024-07-18

    申请号:US18620840

    申请日:2024-03-28

    CPC classification number: F28F13/12 H10N30/2042 H10N30/802

    Abstract: A system includes an active micro-electric mechanical system (MEMS) cooling system and a drive system. The MEMS cooling system includes cooling element(s) that direct fluid toward a surface of heat-generating structure(s) when driven to vibrate by a driving signal having a frequency and an input voltage. The drive system is coupled to the active MEMS cooling system and provides the driving signal. The drive system includes a power source and a feedback controller providing a feedback signal corresponding to a proximity to a resonant state of the at least one cooling element. The drive system adjusts at least one of the frequency and the input voltage based on the feedback signal such that the frequency corresponds to the resonant state of the cooling element(s). The input voltage does not exceed a maximum safe operating voltage for the cooling element(s).

    Frequency lock in active MEMS cooling systems

    公开(公告)号:US11976892B2

    公开(公告)日:2024-05-07

    申请号:US17552290

    申请日:2021-12-15

    CPC classification number: F28F13/12 H10N30/2042 H10N30/802

    Abstract: A system includes an active micro-electric mechanical system (MEMS) cooling system and a drive system. The MEMS cooling system includes cooling element(s) that direct fluid toward a surface of heat-generating structure(s) when driven to vibrate by a driving signal having a frequency and an input voltage. The drive system is coupled to the active MEMS cooling system and provides the driving signal. The drive system includes a power source and a feedback controller providing a feedback signal corresponding to a proximity to a resonant state of the at least one cooling element. The drive system adjusts at least one of the frequency and the input voltage based on the feedback signal such that the frequency corresponds to the resonant state of the cooling element(s). The input voltage does not exceed a maximum safe operating voltage for the cooling element(s).

    DRIVING OF PIEZOELECTRICS FOR MEMS-BASED COOLING SYSTEMS

    公开(公告)号:US20230012794A1

    公开(公告)日:2023-01-19

    申请号:US17860564

    申请日:2022-07-08

    Abstract: A cooling system is described. The cooling system includes a support structure, a cooling element, and drive electronics. The cooling element has a central axis and is supported by the support structure at the central axis. First and second portions of the cooling element are on first and second sides of the central axis and unpinned. The first and second portions of the cooling element undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure. The cooling element further has first and second piezoelectrics having opposite polarizations. The first piezoelectric is part of the first portion of the cooling element. The second piezoelectric is part of the second portion of the cooling element. The drive electronics drive the first and second portions of the cooling element using a single drive signal.

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