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公开(公告)号：US20100294651A1
公开(公告)日：2010-11-25
申请号：US12682549
申请日：2008-10-09
申请人： Fumihiko Yamada , Toshiharu Ozaki , Takaei Sasaki , Masahiko Ishizuka , Kagehiro Kageyama , Hiroyuki Iso , Ryouichi Kobayashi , Atsushi Hayashi
发明人： Fumihiko Yamada , Toshiharu Ozaki , Takaei Sasaki , Masahiko Ishizuka , Kagehiro Kageyama , Hiroyuki Iso , Ryouichi Kobayashi , Atsushi Hayashi
IPC分类号： C23C14/34
CPC分类号： G03F1/50
摘要： A method for manufacturing a gray-tone mask that decreases the wavelength dependency with respect to an exposure wavelength under stable and simple film formation conditions. A reactive sputtering method that sputters a pure Cr target in an atmosphere of Ar and NO is used to form a Cr nitride film having a single-layer structure. Based on a plurality of different spectral transmittance curves obtained under a plurality of film formation conditions having different NO concentrations, a target concentration (intermediate value) for NO is obtained that sets the transmittance uniformity of the semi-transparent film to 1.0% or less in the range of 365 nm to 436 nm or 4.0% or less in the range of 300 nm to 500 nm. Then, a semi-transparent film is formed by using the NO target concentration.
摘要翻译： 一种用于制造在稳定且简单的成膜条件下降低相对于曝光波长的波长依赖性的灰色调掩模的方法。 使用在Ar和NO的气氛中喷射纯Cr靶的反应性溅射法形成具有单层结构的Cr氮化物膜。 基于在具有不同NO浓度的多个成膜条件下获得的多个不同的光谱透射率曲线，获得了将半透明膜的透射率均匀性设定为1.0％以下的目标浓度（中间值）为1.0％以下 365nm至436nm的范围或在300nm至500nm的范围内为4.0％以下的范围。 然后，使用NO靶浓度形成半透明膜。
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公开(公告)号：US4746887A
公开(公告)日：1988-05-24
申请号：US771772
申请日：1985-09-03
申请人： Osamu Nogata , Takashi Kajima , Toshiharu Ozaki
发明人： Osamu Nogata , Takashi Kajima , Toshiharu Ozaki
CPC分类号： H01F7/1638 , H01F7/1607 , H01F2007/1692
摘要： An electromagnet includes a lightweight movable body in the form of a hollow cylindrical body. The resistances of circulation paths for eddy currents flowing in the movable body due to electromagnetic induction are increased to suppress the eddy currents. Excitation coils are connected parallel to each other to reduce the coil inductance for increasing the magnetic forces to attract the movable body and the response thereof.
摘要翻译： 电磁体包括中空圆柱体形式的轻质可移动体。 由于电磁感应而在可移动体中流动的涡流的循环路径的电阻增加，以抑制涡流。 励磁线圈彼此平行地连接，以减小线圈电感，以增加磁力来吸引移动体及其响应。
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公开(公告)号：US4688138A
公开(公告)日：1987-08-18
申请号：US808107
申请日：1985-12-12
申请人： Osamu Nagata , Takashi Kajima , Toshiharu Ozaki
发明人： Osamu Nagata , Takashi Kajima , Toshiharu Ozaki
IPC分类号： H01F7/18 , F02D41/20 , H03K17/041 , H03K17/64 , H01H47/32
CPC分类号： F02D41/20 , H03K17/04113 , H03K17/64 , F02D2041/2017 , F02D2041/2027 , F02D2041/2044 , F02D2041/2058 , F02D2041/2079
摘要： A method and apparatus for driving an electromagnetic device includes two coils which selectively attract and repel a moving body. In order to allow a quick switching of the moving body between being attracted by one coil and the other, the current through the coil which is not holding the moving body in its magnetic field can be made to be a level higher than the current to the coil which is holding the body in its magnetic field. By reducing the current to the coil that is holding the body, the body can be rapidly switched to be within the magnetic field of the other coil. In addition, the currents to the respective coils can be increased before this switching occurs. Structure can also be provided across the coils to quicken the time it takes for the magnetic field to dissipate.
摘要翻译： 用于驱动电磁装置的方法和装置包括选择性地吸引和排斥移动体的两个线圈。 为了允许在一个线圈被另一个线圈吸引之间的移动体的快速切换，可以使通过在其磁场中不保持移动体的线圈的电流高于对于 线圈，其将身体保持在其磁场中。 通过减小到保持体的线圈的电流，能够迅速地将主体切换到另一线圈的磁场内。 此外，在这种切换发生之前，可以增加到各个线圈的电流。 也可以在线圈两端提供结构，以加快磁场耗散所需的时间。
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公开(公告)号：US4067557A
公开(公告)日：1978-01-10
申请号：US702128
申请日：1976-07-02
摘要： A control changeover system in a blast furnace system including a septum valve having a capability of controlling the furnace top pressure in the blast furnace system and a blast furnace gas energy recovery turbine also having a capability of controlling the top pressure by front pressure control is operated with a slight difference between preset values of the top pressure set by a top pressure setter respectively for control by the septum valve and control by the turbine, whereby the predominance in controlling the top pressure between the two control capabilities is automatically changed over from one capability to the other in accordance with an operation of varying the turbine load by means of a load setter provided for the turbine while the two control capabilities are maintained in operative state.
摘要翻译： 在包括具有控制高炉系统中的炉顶压力的能力的隔膜阀和还具有通过正面压力控制来控制顶部压力的能力的高炉煤气能量回收涡轮的高炉系统中的控制切换系统被操作 分别由顶部压力设定器设定的顶部压力的预设值与隔膜阀的控制和涡轮机的控制之间略有差异，由此控制两个控制能力之间的顶部压力的优势将自动地从一个能力改变 根据为涡轮机设置的负载设定器来改变涡轮机负载的操作，另一个控制能力保持在操作状态。
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