Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask
    3.
    发明授权
    Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask 有权
    半色调蒙版,半色调蒙版和制造半色调蒙版的方法

    公开(公告)号:US08216745B2

    公开(公告)日:2012-07-10

    申请号:US12740645

    申请日:2008-10-29

    IPC分类号: G06F1/24

    摘要: A halftone mask increasing the versatility of an etching stopper layer. The half tone mask (10) is provided with a transparent portion (TA) using a glass substrate (S), a first semi-transparent portion (HA) including a first semi-transparent layer (11) formed on the glass substrate, and a light shield portion (PA) including a first semi-transparent portion, a light shield layer (13) superimposed above the first semi-transparent layer, and an etching stopper layer (12) formed between the first semi-transparent layer and the light shield layer. The first semi-transparent layer and the light shield layer are each formed from Cr or at least one selected from the group consisting of an oxide, nitride, carbide, oxynitride, oxycarbide, carbonitride, and oxycarbonitride of Cr. The etching stopper layer includes a first element of at least one selected from the group consisting of Fe, Ni, and Co and a second element of at least one selected from the group consisting of Al, Si, Ti, Nb, Ta, Hf, and Zr.

    摘要翻译: 半色调掩模增加蚀刻阻挡层的通用性。 半色调掩模(10)使用玻璃基板(S)设置透明部分(TA),第一半透明部分(HA)包括形成在玻璃基板上的第一半透明层(11),以及 包括第一半透明部分的遮光部分(PA),叠加在第一半透明层之上的遮光层(13)和形成在第一半透明层和光之间的蚀刻停止层(12) 屏蔽层。 第一半透明层和遮光层各自由Cr或选自Cr的氧化物,氮化物,碳化物,氮氧化物,碳氧化物,碳氮化物和碳氮氧化物中的至少一种形成。 蚀刻停止层包括选自Fe,Ni和Co中的至少一种的第一元素和选自Al,Si,Ti,Nb,Ta,Hf中的至少一种的第二元素, 和Zr。

    Videophone terminal
    4.
    发明授权
    Videophone terminal 有权
    视频电话终端

    公开(公告)号:US07202886B2

    公开(公告)日:2007-04-10

    申请号:US10803239

    申请日:2004-03-18

    IPC分类号: H04N7/14

    CPC分类号: G06T13/80

    摘要: The present invention provides a videophone terminal by which the emotions and impressions of a user can be transmitted to and easily understood by a co-communicant. When a user performs a predetermined operation or when an audio processor identifies a predetermined keyword in the speech of the user, a picture of a virtual character is modified, or a completely different picture is displayed. To modify the picture of the virtual character, the size of each part of the face or the whole face is changed, or a pattern expressing an emotion is added thereto. And when a pending mode is released, the virtual character is recovered and displayed on the screen while a melody is played. At the end of a video conversation, in accordance with the user's selection, a picture indicating that the virtual character disappears from the screen is displayed before disconnecting the line.

    摘要翻译: 本发明提供了一种可视电话终端,通过该视频电话终端可以将用户的情感和印象传送给共同通信者并且易于理解。 当用户执行预定操作时,或者当音频处理器识别用户的语音中的预定关键字时,修改虚拟角色的图片,或者显示完全不同的图片。 为了修改虚拟角色的图片,改变脸部或整个面部的每个部分的大小,或者添加表达情绪的图案。 而当待机模式被释放时,虚拟角色被恢复并显示在屏幕上,同时播放旋律。 在视频会话结束时,根据用户的选择,在断开线路之前,显示指示虚拟角色从屏幕消失的图片。

    PROCESS FOR PRODUCING GRAY TONE MASK
    5.
    发明申请
    PROCESS FOR PRODUCING GRAY TONE MASK 审中-公开
    生产灰色面膜的方法

    公开(公告)号:US20100294651A1

    公开(公告)日:2010-11-25

    申请号:US12682549

    申请日:2008-10-09

    IPC分类号: C23C14/34

    CPC分类号: G03F1/50

    摘要: A method for manufacturing a gray-tone mask that decreases the wavelength dependency with respect to an exposure wavelength under stable and simple film formation conditions. A reactive sputtering method that sputters a pure Cr target in an atmosphere of Ar and NO is used to form a Cr nitride film having a single-layer structure. Based on a plurality of different spectral transmittance curves obtained under a plurality of film formation conditions having different NO concentrations, a target concentration (intermediate value) for NO is obtained that sets the transmittance uniformity of the semi-transparent film to 1.0% or less in the range of 365 nm to 436 nm or 4.0% or less in the range of 300 nm to 500 nm. Then, a semi-transparent film is formed by using the NO target concentration.

    摘要翻译: 一种用于制造在稳定且简单的成膜条件下降低相对于曝光波长的波长依赖性的灰色调掩模的方法。 使用在Ar和NO的气氛中喷射纯Cr靶的反应性溅射法形成具有单层结构的Cr氮化物膜。 基于在具有不同NO浓度的多个成膜条件下获得的多个不同的光谱透射率曲线,获得了将半透明膜的透射率均匀性设定为1.0%以下的目标浓度(中间值)为1.0%以下 365nm至436nm的范围或在300nm至500nm的范围内为4.0%以下的范围。 然后,使用NO靶浓度形成半透明膜。

    HALF-TONE MASK, HALF-TONE MASK BLANK AND METHOD FOR MANUFACTURING HALF-TONE MASK
    10.
    发明申请
    HALF-TONE MASK, HALF-TONE MASK BLANK AND METHOD FOR MANUFACTURING HALF-TONE MASK 有权
    高音喇叭口罩,高音喇叭口罩和制造喇叭口罩的方法

    公开(公告)号:US20100261096A1

    公开(公告)日:2010-10-14

    申请号:US12740645

    申请日:2008-10-29

    IPC分类号: G03F1/00

    摘要: A halftone mask increasing the versatility of an etching stopper layer. The half tone mask (10) is provided with a transparent portion (TA) using a glass substrate (S), a first semi-transparent portion (HA) including a first semi-transparent layer (11) formed on the glass substrate, and a light shield portion (PA) including a first semi-transparent portion, a light shield layer (13) superimposed above the first semi-transparent layer, and an etching stopper layer (12) formed between the first semi-transparent layer and the light shield layer. The first semi-transparent layer and the light shield layer are each formed from Cr or at least one selected from the group consisting of an oxide, nitride, carbide, oxynitride, oxycarbide, carbonitride, and oxycarbonitride of Cr. The etching stopper layer includes a first element of at least one selected from the group consisting of Fe, Ni, and Co and a second element of at least one selected from the group consisting of Al, Si, Ti, Nb, Ta, Hf, and Zr.

    摘要翻译: 半色调掩模增加蚀刻阻挡层的通用性。 半色调掩模(10)使用玻璃基板(S)设置透明部分(TA),第一半透明部分(HA)包括形成在玻璃基板上的第一半透明层(11),以及 包括第一半透明部分的遮光部分(PA),叠加在第一半透明层之上的遮光层(13)和形成在第一半透明层和光之间的蚀刻停止层(12) 屏蔽层。 第一半透明层和遮光层各自由Cr或选自Cr的氧化物,氮化物,碳化物,氧氮化物,碳氧化物,碳氮化物和碳氮氧化物中的至少一种形成。 蚀刻停止层包括选自Fe,Ni和Co中的至少一种的第一元素和选自Al,Si,Ti,Nb,Ta,Hf中的至少一种的第二元素, 和Zr。