公开(公告)号：US20180286681A1

公开(公告)日：2018-10-04

申请号：US15478441

申请日：2017-04-04

Applicant: GLOBALFOUNDRIES INC.

Inventor： Erik A. Verduijn ,  Genevieve Beique ,  Nicholas V. LiCausi ,  Lei Sun ,  Francis G. Goodwin

IPC: H01L21/033 ,  H01L21/66

Abstract: The disclosure is directed to methods of identifying a space within an integrated circuit structure as a mandrel space or a non-mandrel space. One method may include: identifying a space between freestanding spacers as being one of: a former mandrel space created by removal of a mandrel from between the freestanding spacers or a non-mandrel space between adjacent mandrels prior to removal of the mandrel, based on a line width roughness of the space, wherein the line width roughness represents a deviation of a width of the space from a centerline axis along a length of the space.