公开(公告)号：US10325824B2

公开(公告)日：2019-06-18

申请号：US15622061

申请日：2017-06-13

Applicant: GLOBALFOUNDRIES INC.

Inventor： Mitsuhiro Togo ,  Ram Asra ,  Xing Zhang ,  Palanivel Balasubramaniam

IPC: H01L21/66 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/10 ,  H01L29/423

Abstract: At least one method, apparatus and system are disclosed for controlling threshold voltage values for a plurality of transistor devices. Determine a first threshold voltage of a first transistor gate comprising a first gate channel having a first length. Determine a second length of a second gate channel of a second transistor gate. Determining a process adjustment of the second gate based on the second length for providing a second threshold voltage of the second transistor gate. The second threshold voltage is within a predetermined range of the first threshold voltage. Provide data relating to process adjustment to a process controller for performing the process adjustment.

公开(公告)号：US20180358272A1

公开(公告)日：2018-12-13

申请号：US15622061

申请日：2017-06-13

Applicant: GLOBALFOUNDRIES INC.

Inventor： Mitsuhiro Togo ,  Ram Asra ,  Xing Zhang ,  Palanivel Balasubramaniam

IPC: H01L21/66 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/10 ,  H01L29/423

CPC classification number: H01L22/20 ,  H01L21/823807 ,  H01L21/823821 ,  H01L21/82385 ,  H01L27/0922 ,  H01L27/0924 ,  H01L29/1037 ,  H01L29/42376

Abstract: At least one method, apparatus and system are disclosed for controlling threshold voltage values for a plurality of transistor devices. Determine a first threshold voltage of a first transistor gate comprising a first gate channel having a first length. Determine a second length of a second gate channel of a second transistor gate. Determining a process adjustment of the second gate based on the second length for providing a second threshold voltage of the second transistor gate. The second threshold voltage is within a predetermined range of the first threshold voltage. Provide data relating to process adjustment to a process controller for performing the process adjustment.