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公开(公告)号:US20170221887A1
公开(公告)日:2017-08-03
申请号:US15013393
申请日:2016-02-02
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ramana Malladi , Renata Camillo-Castillo
IPC: H01L27/082 , H01L29/737 , H01L23/66 , H01L29/161 , H01L29/165 , H01L21/8228 , H01L29/66
CPC classification number: H01L27/0826 , H01L21/82285 , H01L23/66 , H01L29/0653 , H01L29/0692 , H01L29/0813 , H01L29/0817 , H01L29/161 , H01L29/165 , H01L29/66242 , H01L29/732 , H01L29/7371 , H01L29/7378
Abstract: Device structures and fabrication methods for a device structure. One or more trench isolation regions are formed in a substrate to surround a device region. A base layer is formed on the device region. First and second emitter fingers are formed on the base layer. A portion of the device region extending from the first emitter finger to the second emitter finger is free of dielectric material.
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公开(公告)号:US09812447B2
公开(公告)日:2017-11-07
申请号:US15013393
申请日:2016-02-02
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ramana Malladi , Renata Camillo-Castillo
IPC: H01L29/737 , H01L27/082 , H01L21/8228 , H01L29/66 , H01L29/161 , H01L29/165 , H01L23/66
CPC classification number: H01L27/0826 , H01L21/82285 , H01L23/66 , H01L29/0653 , H01L29/0692 , H01L29/0813 , H01L29/0817 , H01L29/161 , H01L29/165 , H01L29/66242 , H01L29/732 , H01L29/7371 , H01L29/7378
Abstract: Device structures and fabrication methods for a device structure. One or more trench isolation regions are formed in a substrate to surround a device region. A base layer is formed on the device region. First and second emitter fingers are formed on the base layer. A portion of the device region extending from the first emitter finger to the second emitter finger is free of dielectric material.
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