公开(公告)号：US20180238958A1

公开(公告)日：2018-08-23

申请号：US15440791

申请日：2017-02-23

Applicant: GLOBALFOUNDRIES INC.

Inventor： Zhigang Song ,  Qian Xu ,  William Davies, JR.

IPC: G01R31/28 ,  G06F17/16 ,  G06F7/556

CPC classification number: G01R31/2851 ,  G06F7/556 ,  G06F17/16

Abstract: Failure types that caused defective items to fail testing are identified, the defective items are grouped by the failure types to produce failure-type groups, and the defective items are analyzed to identify defect types that caused the failures. Failure-type limited yield within each of the failure-type groups, and failure-type group-specific defect ratio based on proportions of the defect types within each of the failure-type groups are determined. Additionally, each failure-type group-specific defect ratio is weighted using the failure-type limited yield to produce a weighted failure-type group-specific defect limited yield. For each of the defect types, the weighted failure-type group-specific defect limited yield from each of the failure-type groups is combined to produce the failure-type influenced defect-type total limited yield. Matrix processing is used for the weighting and combination processes. The defect types are ranked based on the failure-type influenced defect-type total limited yield.