公开(公告)号：US20160268152A1

公开(公告)日：2016-09-15

申请号：US15164204

申请日：2016-05-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

IPC: H01L21/677 ,  B65G1/04

CPC classification number: H01L21/67733 ,  B65G1/0464 ,  B65G2201/0297 ,  H01L21/677

Abstract: A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above the overhead rack, a first cross rail movably coupled to the first and second side rails, and a first transport vehicle movably coupled to the first cross rail includes positioning the first transport vehicle above at least one interior window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the interior window to interface with a first load port of a first tool disposed below the overhead rack. The first transport vehicle is positioned above at least one periphery window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the periphery window to interface with a second load port of a second tool disposed below the overhead rack.

Abstract translation: 一种用于操作材料处理系统的方法，所述材料处理系统包括限定多个存储位置的顶架，布置在所述架空架上方的第一和第二侧轨，可移动地联接到所述第一和第二侧轨的第一横梁，以及可移动地 耦合到所述第一交叉导轨包括将所述第一运输车辆定位在限定在所述架空架中的至少一个内部窗口之上。 第一运输车辆的至少一部分通过内部窗口下降，以与设置在架空架下方的第一工具的第一负载端口相接。 第一运输车辆位于架空架上限定的至少一个外围窗口的上方。 第一运输车辆的至少一部分通过周边窗口下降，以与布置在架空架下方的第二工具的第二负载端口相接。

公开(公告)号：US10109516B2

公开(公告)日：2018-10-23

申请号：US15164204

申请日：2016-05-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

IPC: H01L21/677 ,  B65G1/04

Abstract: A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above the overhead rack, a first cross rail movably coupled to the first and second side rails, and a first transport vehicle movably coupled to the first cross rail includes positioning the first transport vehicle above at least one interior window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the interior window to interface with a first load port of a first tool disposed below the overhead rack. The first transport vehicle is positioned above at least one periphery window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the periphery window to interface with a second load port of a second tool disposed below the overhead rack.

公开(公告)号：US20140178160A1

公开(公告)日：2014-06-26

申请号：US14191767

申请日：2014-02-27

Applicant: GLOBALFOUNDRIES Inc.

Inventor： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

IPC: H01L21/677

CPC classification number: H01L21/67733 ,  B65G1/0464 ,  B65G2201/0297 ,  H01L21/677

Abstract: A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.

Abstract translation: 材料处理系统包括限定多个存储位置的架空架。 架空架定义至少一个没有存储位置的内部窗口。 第一和第二侧轨设置在架空架上方。 第一横梁可移动地联接到第一和第二侧轨。 第一运输车辆可移动地联接到第一交叉轨道并且可操作以通过至少一个内部窗口在架空架下方下降。