公开(公告)号：US20160306009A1

公开(公告)日：2016-10-20

申请号：US14689088

申请日：2015-04-17

申请人： GLOBALFOUNDRIES Inc.

发明人： Weihong GAO ,  Xuefeng ZENG ,  Yan PAN ,  Peter LIN ,  Hoang NGUYEN ,  Ho Young SONG

IPC分类号： G01R31/305

CPC分类号： G01R31/305 ,  G01R31/307

摘要： A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.

摘要翻译： 提供了一种基于eBeam VC跟踪分类的虚拟DV模块比较检查结果，通过缺陷与真实DVC分离真实DVC的方法和装置。 实施例包括对多个管芯的每个通孔执行eBeam VC管芯比较检查; 根据比较确定DVC通孔; 对DVC通道进行净跟踪分类; 根据网络跟踪分类确定S / D DVC通道; 并对S / D DVC通孔进行芯片中继器分析，以通过缺陷确定与系统设计相关的DVC。