公开(公告)号：US09875936B1

公开(公告)日：2018-01-23

申请号：US15348109

申请日：2016-11-10

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ryan Sporer ,  Rohit Pal ,  Jeremy Wahl

IPC: H01L29/66 ,  H01L21/02 ,  H01L21/304 ,  H01L21/306 ,  H01L21/308 ,  H01L29/04 ,  H01L29/06 ,  H01L21/8234 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/3105 ,  H01L27/088 ,  H01L27/092

CPC classification number: H01L21/823431 ,  H01L21/31053 ,  H01L21/76224 ,  H01L21/823821 ,  H01L27/0886 ,  H01L27/0924 ,  H01L29/6653 ,  H01L29/66795

Abstract: Methods for forming fins with a straight profile by preventing fin bending during STI fill and annealing are disclosed. Embodiments include providing STI regions separated by Si regions, each topped with a hardmask; planarizing the STI regions; removing the hardmask over a portion of the Si regions, forming recesses; forming a conformal spacer layer over the STI regions and in the recesses; removing horizontal portions of the spacer layer; epitaxially growing Si in each recess, forming fins; and etching the STI regions and a remainder of the spacer layer down to the Si regions to reveal the fins.