公开(公告)号：US10444433B1

公开(公告)日：2019-10-15

申请号：US16170262

申请日：2018-10-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Abu Thomas ,  Ajey Poovannummoottil Jacob ,  Kenneth J. Giewont ,  Karen Nummy ,  Andreas Stricker ,  Bo Peng

IPC: G02B6/122 ,  G02B6/136 ,  G02B6/12

Abstract: Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A tapered feature composed of a dielectric material is arranged over the waveguide. The tapered feature includes a sidewall that is angled relative to a longitudinal axis of the waveguide.