公开(公告)号：US10795082B1

公开(公告)日：2020-10-06

申请号：US16540452

申请日：2019-08-14

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ajey Poovannummoottil Jacob ,  Yusheng Bian ,  Theodore Letavic ,  Kenneth J. Giewont ,  Steven M. Shank

IPC: G02B6/124 ,  G02B6/12 ,  G02B6/13

Abstract: Structures that include a Bragg grating and methods of fabricating a structure that includes a Bragg grating. Bragg elements are positioned adjacent to a waveguide. The Bragg elements are separated by grooves that alternate with the Bragg elements. A dielectric layer includes portions positioned to close the grooves to define airgaps. The airgaps are respectively arranged between adjacent pairs of the Bragg elements. The Bragg elements may be used to form the Bragg grating.