公开(公告)号：US10755982B1

公开(公告)日：2020-08-25

申请号：US16508816

申请日：2019-07-11

申请人： GLOBALFOUNDRIES Inc.

发明人： Abu Naser M. Zainuddin ,  Wei Ma ,  Daniel Jaeger ,  Joseph Versaggi ,  Jae Gon Lee ,  Thomas Kauerauf

IPC分类号： H01L21/8234 ,  H01L27/088 ,  H01L29/66

摘要： One illustrative method disclosed herein includes forming 1st and 2nd sacrificial gate structures for, respectively, 1st and 2nd devices, removing 1st and 2nd sacrificial gate electrodes from the 1st and 2nd sacrificial gate structures so as to at least partially define, respectively, 1st and 2nd replacement gate (RMG) cavities, and removing the 2nd sacrificial gate insulation layer from the 2nd RMG cavity while leaving the 1st sacrificial gate insulation layer in position in the 1st RMG cavity. The method also includes forming a conformal gate insulation layer in both the 1st and 2nd RMG cavities, removing the conformal gate insulation layer and the 1st sacrificial gate insulation layer from the 1st RMG cavity while leaving the conformal gate insulation layer in the 2nd RMG cavity, and performing an oxidation process to form an interfacial gate insulation layer only in the 1st RMG cavity.