公开(公告)号：US20160211161A1

公开(公告)日：2016-07-21

申请号：US15084893

申请日：2016-03-30

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Edmund Blackshear ,  Vijayeshwar D. Khanna ,  Oswald J. Mantilla

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/687 ,  H01L21/67092 ,  H01L24/75 ,  H01L2224/73204 ,  H01L2224/75703 ,  Y10T29/49826 ,  Y10T29/49998

Abstract: A clamping apparatus applies a force to a workpiece during processing. The clamping apparatus includes a base defining a work area configured to receive a joined structure having multiple elements. The base defines a recess in the work area. An adjustable mechanism is configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process. A resilient plunger is part of the adjustable mechanism. The resilient plunger extends downwardly from a top plate of the adjustable mechanism, and the resilient plunger is configured to contact a top of a first element of the joined structure to apply the downward force.

Abstract translation: 夹紧装置在加工过程中对工件施加力。 夹紧装置包括限定被配置为接收具有多个元件的接合结构的工作区域的基座。 基座在工作区域中定义了一个凹槽。 可调机构构造成可释放地联接到基座并且向接合的结构施加可调节的向下的力，以在接合的结构中将接合的结构向下弯曲到凹部中。 弹性柱塞是可调机构的一部分。 弹性柱塞从可调节机构的顶板向下延伸，并且弹性柱塞构造成接触连接结构的第一元件的顶部以施加向下的力。

公开(公告)号：US09305894B2

公开(公告)日：2016-04-05

申请号：US13910152

申请日：2013-06-05

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Edmund Blackshear ,  Vijayeshwar D. Khanna ,  Oswald J. Mantilla

IPC: H01L23/00

CPC classification number: H01L21/687 ,  H01L21/67092 ,  H01L24/75 ,  H01L2224/73204 ,  H01L2224/75703 ,  Y10T29/49826 ,  Y10T29/49998

Abstract: A clamping apparatus applies a force to a workpiece during processing. The clamping apparatus includes a base defining a work area configured to receive a joined structure having multiple elements. The base defines a recess in the work area. An adjustable mechanism is configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process. A resilient plunger is part of the adjustable mechanism. The resilient plunger extends downwardly from a top plate of the adjustable mechanism, and the resilient plunger is configured to contact a top of a first element of the joined structure to apply the downward force.

Abstract translation: 夹紧装置在加工过程中对工件施加力。 夹紧装置包括限定被配置为接收具有多个元件的接合结构的工作区域的基座。 基座在工作区域中定义了一个凹槽。 可调机构构造成可释放地联接到基座并且向接合的结构施加可调节的向下的力，以在接合的结构中将接合的结构向下弯曲到凹部中。 弹性柱塞是可调机构的一部分。 弹性柱塞从可调节机构的顶板向下延伸，并且弹性柱塞构造成接触连接结构的第一元件的顶部以施加向下的力。