公开(公告)号：US09640608B1

公开(公告)日：2017-05-02

申请号：US15052961

申请日：2016-02-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ki Young Lee ,  Woong Lae Cho ,  Jae Ho Joung

IPC: H01L23/00 ,  H01L21/768 ,  H01L49/02

CPC classification number: H01L28/60 ,  H01L27/10805 ,  H01L28/00 ,  H01L28/75 ,  H01L28/92

Abstract: A capacitor includes a bottom electrode and a top electrode positioned above the bottom electrode. The top electrode and the bottom electrode are conductively coupled to one another. A middle electrode is positioned between the bottom electrode and the top electrode. A lower dielectric layer is positioned between the bottom electrode and the middle electrode. An upper dielectric layer positioned between the middle electrode and the top electrode. A first contact is conductively coupled to the top electrode. A second contact is conductively coupled to the middle electrode.

公开(公告)号：US09871096B2

公开(公告)日：2018-01-16

申请号：US15459450

申请日：2017-03-15

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ki Young Lee ,  Woong Lae Cho ,  Jae Ho Joung

IPC: H01L23/00 ,  H01L21/768 ,  H01L49/02 ,  H01L27/108

CPC classification number: H01L28/60 ,  H01L27/10805 ,  H01L28/00 ,  H01L28/75 ,  H01L28/92

Abstract: A capacitor includes a bottom electrode and a top electrode positioned above the bottom electrode. The top electrode and the bottom electrode are conductively coupled to one another. A middle electrode is positioned between the bottom electrode and the top electrode. A lower dielectric layer is positioned between the bottom electrode and the middle electrode. An upper dielectric layer is positioned between the middle electrode and the top electrode. A first contact is conductively coupled to the top electrode. A second contact is conductively coupled to the middle electrode.