公开(公告)号：US20210265513A1

公开(公告)日：2021-08-26

申请号：US16798417

申请日：2020-02-23

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： YUSHENG BIAN ,  AJEY POOVANNUMMOOTTIL JACOB

IPC: H01L31/0232 ,  H01L31/028 ,  G02B6/42 ,  G02B6/12 ,  G02B6/122

Abstract: The present disclosure generally relates to structures for use in optoelectronic/photonic applications and integrated circuit (IC) chips. The present disclosure also relates to semiconductor devices having a photodetector coupled with a waveguide, more particularly, a photodetector with a butt-end coupled waveguide. The present disclosure provides a structure having a substrate, a photodetector arranged above the substrate, the photodetector having a core body and a coupler that is adjacent to the core body, in which the core body is configured to absorb light received by the coupler, and the coupler including a plurality of grating structures having respective widths that vary as a function of position relative to the core body.