公开(公告)号：US11187852B1

公开(公告)日：2021-11-30

申请号：US17160710

申请日：2021-01-28

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Domingo Ferrer ,  Roderick A. Augur ,  Michal Rakowski

IPC: G02B6/02 ,  G02B6/293 ,  G02B6/34 ,  G02B6/028 ,  G02B6/36

Abstract: Structures that include a Bragg grating and methods of fabricating a structure that includes a Bragg grating. The structure includes a waveguide core and a Bragg grating having a plurality of segments positioned with a spaced arrangement adjacent to the waveguide core. Each segment includes one or more exterior surfaces. The structure further includes a silicide layer located on the one or more exterior surfaces of each segment.