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公开(公告)号:US20240393624A1
公开(公告)日:2024-11-28
申请号:US18200643
申请日:2023-05-23
Applicant: GlobalFoundries U.S. Inc.
Inventor: Brian McGowan , Ping-Chuan Wang , Michal Rakowski , Sujith Chandran , Yusheng Bian
IPC: G02F1/01
Abstract: Structures for a thermo-optic phase shifter and methods of forming a thermo-optic phase shifter. The structure comprises an interconnect structure including a dielectric layer, a waveguide core on the dielectric layer, and a heater on the dielectric layer. The heater includes a resistive heating element positioned adjacent to the waveguide core.
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公开(公告)号:US20230341627A1
公开(公告)日:2023-10-26
申请号:US17729031
申请日:2022-04-26
Applicant: GlobalFoundries U.S. Inc.
Inventor: Michal Rakowski , Vaibhav A. Ruparelia , Riddhi Nandi , Prateek K. Sharma , Avijit Chatterjee , Vasudeva Reddy KuppiReddy , Indranil Som
CPC classification number: G02B6/2934 , G02B6/12026 , G02F2201/58 , H01S3/083
Abstract: Disclosed is a thermal stabilization circuit including a heater, which is adjacent and thermally coupled to a closed-curve waveguide of an optical ring resonator, and an analog feedback circuit, which includes a fully autonomous analog feedback loop from a drop port of a bus waveguide of the optical ring resonator to the heater. This analog feedback circuit is configured to dynamically control the electrical power provided to the heater and, thereby to dynamically control the thermal output of the heater in order to tune the ring resonance wavelength to the operating laser wavelength. The analog feedback circuit is further configured to be independent of input power, to be power efficient, to have a relatively small footprint, to have a tunable time constant and to facilitate adjustable wavelength locking. Also disclosed is a device (e.g., a ring-based transceiver or the like), which includes multiple optical ring resonators and corresponding thermal stabilization circuits.
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公开(公告)号:US11500198B2
公开(公告)日:2022-11-15
申请号:US17146509
申请日:2021-01-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Won Suk Lee , Thomas G. Weeks, III , Michal Rakowski , Yusheng Bian , Roderick A. Augur , Alexander L. Martin , Petar I. Todorov
Abstract: Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.
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公开(公告)号:US11474294B2
公开(公告)日:2022-10-18
申请号:US17162303
申请日:2021-01-29
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur
Abstract: Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are spaced along a longitudinal axis. Each segment is inclined relative to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature that is inverted relative to the first curvature.
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公开(公告)号:US20220299706A1
公开(公告)日:2022-09-22
申请号:US17202729
申请日:2021-03-16
Inventor: Yusheng Bian , Michal Rakowski , Roderick A. Augur , Marios Papadovasilakis , Sujith Chandran , Jaime Viegas , Yonas Gebregiorgis
Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. A waveguide core of the wavelength-division multiplexing filter includes a first bend having a first curvature and a second bend having a second curvature different than the first curvature. The structure further includes a waveguide core region having a first end surface, a second end surface, and a bend arranged between the first and second end surfaces. The bend is positioned over the first bend of the waveguide core in an overlapping relationship.
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公开(公告)号:US11215756B2
公开(公告)日:2022-01-04
申请号:US16859347
申请日:2020-04-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Michal Rakowski , Kenneth J. Giewont , Karen Nummy , Kevin K. Dezfulian , Bo Peng
Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.
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公开(公告)号:US20210333474A1
公开(公告)日:2021-10-28
申请号:US16859347
申请日:2020-04-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Michal Rakowski , Kenneth J. Giewont , Karen Nummy , Kevin K. Dezfulian , Bo Peng
Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.
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公开(公告)号:US12001056B2
公开(公告)日:2024-06-04
申请号:US17834375
申请日:2022-06-07
Applicant: GlobalFoundries U.S. Inc.
Inventor: Bartlomiej Jan Pawlak , Michal Rakowski , Yusheng Bian
CPC classification number: G02B6/2934 , G02B6/4215
Abstract: Structures including stacked photonics chips and methods of fabricating a structure including stacked photonics chips. The structure comprises a first chip including a first waveguide core, a ring resonator adjacent to a portion of the first waveguide core, and a first dielectric layer over the first waveguide core and the ring resonator. The first dielectric layer has a first surface. The structure further comprises a second chip including a second waveguide core and a second dielectric layer over the second waveguide core. The second dielectric layer has a second surface adjacent to the first surface of the first dielectric layer, and the second waveguide core is positioned adjacent to the ring resonator.
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公开(公告)号:US20230288321A1
公开(公告)日:2023-09-14
申请号:US17689120
申请日:2022-03-08
Applicant: GlobalFoundries U.S. Inc.
Inventor: Bartlomiej J. Pawlak , Michal Rakowski
CPC classification number: G01N21/31 , G02B6/29343 , G02B6/2935
Abstract: Disclosed is a structure (e.g., a lab-on-chip structure) including a substrate, an insulator layer on the substrate, and at least one optical ring resonator. Each ring resonator includes cladding material on the insulator layer and, embedded within the cladding material, a first waveguide core with an input and an output, and second waveguide core(s) (e.g., ring waveguide core(s)) positioned laterally adjacent to the first waveguide core. A reservoir is below the ring resonator within the insulator layer and substrate such that surfaces of the waveguide cores are exposed within the reservoir. During a sensing operation, the waveguide core surfaces contact with fluid within the reservoir and a light signal at the output of the first waveguide core is monitored (e.g., by a sensing circuit, which in some embodiments is also coupled to a reference optical ring resonator) and used, for example, for spectrum-based target identification and, optionally, characterization.
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公开(公告)号:US11740418B2
公开(公告)日:2023-08-29
申请号:US17209416
申请日:2021-03-23
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Nicholas A. Polomoff , John J. Ellis-Monaghan , Frank G. Kuechenmeister , Jae Kyu Cho , Michal Rakowski
CPC classification number: G02B6/4248 , G02B6/30 , H01L23/562 , G02B2006/12119
Abstract: Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.
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