公开(公告)号：US11248822B2

公开(公告)日：2022-02-15

申请号：US16522270

申请日：2019-07-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Thomas Huang

IPC: H01L21/67 ,  F24H1/00

Abstract: One illustrative energy recovery system disclosed herein includes a semiconductor fabrication facility (“fab”) and a closed chilled water loop including a chilled water stream delivered to the fab and a returning water stream that is received from the fab. In this example, the system also includes a primary heat exchanger having a first fluid side and a second fluid side, the first fluid side is adapted to receive supply water and the second fluid side is adapted to receive at least a portion of the returning return water stream, wherein the primary heat exchanger is adapted to effectuate heat transfer between the supply water flowing in the first fluid side and the returning water stream flowing in the second fluid side.

公开(公告)号：US11644218B2

公开(公告)日：2023-05-09

申请号：US17556762

申请日：2021-12-20

Applicant: GlobalFoundries U.S. Inc.

Inventor： Thomas Huang

IPC: H01L21/67 ,  F24H1/00

CPC classification number: F24H1/00

Abstract: One illustrative energy recovery system disclosed herein includes a facility and a closed chilled water loop including a chilled water stream delivered to the facility and a returning water stream that is received from the facility. In this example, the system also includes a primary heat exchanger having a first fluid side and a second fluid side, the first fluid side is adapted to receive supply water and the second fluid side is adapted to receive at least a portion of the returning return water stream. The primary heat exchanger is adapted to effectuate heat transfer between the supply water flowing in the first fluid side and the returning water stream flowing in the second fluid side.

公开(公告)号：US20220113060A1

公开(公告)日：2022-04-14

申请号：US17556762

申请日：2021-12-20

Applicant: GlobalFoundries U.S. Inc.

Inventor： Thomas Huang

IPC: F24H1/00

Abstract: One illustrative energy recovery system disclosed herein includes a facility and a closed chilled water loop including a chilled water stream delivered to the facility and a returning water stream that is received from the facility. In this example, the system also includes a primary heat exchanger having a first fluid side and a second fluid side, the first fluid side is adapted to receive supply water and the second fluid side is adapted to receive at least a portion of the returning return water stream. The primary heat exchanger is adapted to effectuate heat transfer between the supply water flowing in the first fluid side and the returning water stream flowing in the second fluid side.