公开(公告)号：US11002763B2

公开(公告)日：2021-05-11

申请号：US16100297

申请日：2018-08-10

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Ye Wang ,  Hanyi Ding ,  Timothy M. Platt

IPC: G01R1/073 ,  G01R1/067

Abstract: Embodiments of the disclosure provide a probe structured for electrical and photonics testing of a photonic integrated circuit (PIC) die, the probe including: a membrane having a first surface and an opposing second surface and including conductive traces, the membrane being configured for electrical coupling to a probe interface board (PIB); a set of probe tips positioned on the membrane, the set of probe tips being configured to send electrical test signals to the PIC die or receive electrical test signals from the PIC die; and a photonic test assembly disposed on the membrane and electrically coupled to the conductive traces of the membrane, the photonic test assembly positioned for substantial alignment with a photonic I/O element of the PIC die, wherein the photonic test assembly is configured to transmit a photonic input signal to the photonic I/O element or detect a photonic output signal from the photonic I/O element.