CAPACITIVE ANGLE SENSING OF ELECTROSTATIC MEMS MIRRORS

    公开(公告)号:US20220269070A1

    公开(公告)日:2022-08-25

    申请号:US17220627

    申请日:2021-04-01

    Applicant: GOOGLE LLC

    Abstract: A system includes an optical reflector to reflect the light, the optical reflector having a rotor, a first stator, and a second stator. The system further includes a controller in communication with the optical reflector. The controller is to drive the optical reflector by applying a first actuation voltage to the first stator, and a second actuation voltage to the second stator. Further, the controller is to apply an excitation voltage to the first stator. Furthermore, the controller is to determine a relationship between a first capacitance between the rotor and the first stator, and a second capacitance between the rotor and the second stator. Based on the relationship, the controller is to determine a position attribute of the optical reflector.

    Capacitive angle sensing of electrostatic MEMS mirrors

    公开(公告)号:US12072485B2

    公开(公告)日:2024-08-27

    申请号:US17220627

    申请日:2021-04-01

    Applicant: GOOGLE LLC

    CPC classification number: G02B26/0841 B81B3/0083 B81B2201/047

    Abstract: A system includes an optical reflector to reflect the light, the optical reflector having a rotor, a first stator, and a second stator. The system further includes a controller in communication with the optical reflector. The controller is to drive the optical reflector by applying a first actuation voltage to the first stator, and a second actuation voltage to the second stator. Further, the controller is to apply an excitation voltage to the first stator. Furthermore, the controller is to determine a relationship between a first capacitance between the rotor and the first stator, and a second capacitance between the rotor and the second stator. Based on the relationship, the controller is to determine a position attribute of the optical reflector.

Patent Agency Ranking