ACTIVE ACOUSTIC RIPPLE CANCELLATION FOR MEMS MIRRORS

    公开(公告)号:US20230296879A1

    公开(公告)日:2023-09-21

    申请号:US17694845

    申请日:2022-03-15

    Applicant: GOOGLE LLC

    CPC classification number: G02B26/0841 G10K11/17823 G10K11/17873 H04N9/3194

    Abstract: Systems, devices, and methods are described for mitigating or eliminating distortion patterns (such as those caused by one or more high-volume audio sources) in a display system such as a laser projection system. Frequency components of an incoming sound that correspond to one or more resonant frequencies of an optical reflector of the display system are determined to exceed a defined volume threshold. Responsive to that determination, a magnitude and phase of one or more harmonic motions of the optical reflector are measured. Sound waves are generated to destructively interfere with at least one frequency component corresponding to the resonant frequencies of the optical reflector.

    CAPACITIVE ANGLE SENSING OF ELECTROSTATIC MEMS MIRRORS

    公开(公告)号:US20220269070A1

    公开(公告)日:2022-08-25

    申请号:US17220627

    申请日:2021-04-01

    Applicant: GOOGLE LLC

    Abstract: A system includes an optical reflector to reflect the light, the optical reflector having a rotor, a first stator, and a second stator. The system further includes a controller in communication with the optical reflector. The controller is to drive the optical reflector by applying a first actuation voltage to the first stator, and a second actuation voltage to the second stator. Further, the controller is to apply an excitation voltage to the first stator. Furthermore, the controller is to determine a relationship between a first capacitance between the rotor and the first stator, and a second capacitance between the rotor and the second stator. Based on the relationship, the controller is to determine a position attribute of the optical reflector.

    Active acoustic ripple cancellation for MEMS mirrors

    公开(公告)号:US12223941B2

    公开(公告)日:2025-02-11

    申请号:US17694845

    申请日:2022-03-15

    Applicant: GOOGLE LLC

    Abstract: Systems, devices, and methods are described for mitigating or eliminating distortion patterns (such as those caused by one or more high-volume audio sources) in a display system such as a laser projection system. Frequency components of an incoming sound that correspond to one or more resonant frequencies of an optical reflector of the display system are determined to exceed a defined volume threshold. Responsive to that determination, a magnitude and phase of one or more harmonic motions of the optical reflector are measured. Sound waves are generated to destructively interfere with at least one frequency component corresponding to the resonant frequencies of the optical reflector.

    Capacitive angle sensing of electrostatic MEMS mirrors

    公开(公告)号:US12072485B2

    公开(公告)日:2024-08-27

    申请号:US17220627

    申请日:2021-04-01

    Applicant: GOOGLE LLC

    CPC classification number: G02B26/0841 B81B3/0083 B81B2201/047

    Abstract: A system includes an optical reflector to reflect the light, the optical reflector having a rotor, a first stator, and a second stator. The system further includes a controller in communication with the optical reflector. The controller is to drive the optical reflector by applying a first actuation voltage to the first stator, and a second actuation voltage to the second stator. Further, the controller is to apply an excitation voltage to the first stator. Furthermore, the controller is to determine a relationship between a first capacitance between the rotor and the first stator, and a second capacitance between the rotor and the second stator. Based on the relationship, the controller is to determine a position attribute of the optical reflector.

    MEMS DEVICE WITH ELLIPTICAL MIRROR
    5.
    发明公开

    公开(公告)号:US20240295742A1

    公开(公告)日:2024-09-05

    申请号:US18647361

    申请日:2024-04-26

    Applicant: GOOGLE LLC

    Abstract: Optical systems may include MEMS mirrors having elliptical mirror plates. A laser scanning system may include a MEMS mirror that scans an incident light beam along a single scanning axis. The MEMS mirror may include an elliptical mirror plate having a semi-major axis that is aligned parallel or perpendicular to the rotational axis of the elliptical mirror plate. The incident light beam may have an elliptical cross-section, such that the incident light beam completely or substantially overlaps the reflecting surface of the elliptical mirror plate. After being reflected by the elliptical mirror plate, the light beam may be circularized via one or more shaping lenses disposed in the optical path of the reflected light beam, prior to projection of the light beam.

    MEMS device with elliptical mirror

    公开(公告)号:US11971556B2

    公开(公告)日:2024-04-30

    申请号:US17201804

    申请日:2021-03-15

    Applicant: GOOGLE LLC

    Abstract: Optical systems may include MEMS mirrors having elliptical mirror plates. A laser scanning system may include a MEMS mirror that scans an incident light beam along a single scanning axis. The MEMS mirror may include an elliptical mirror plate having a semi-major axis that is aligned parallel or perpendicular to the rotational axis of the elliptical mirror plate. The incident light beam may have an elliptical cross-section, such that the incident light beam completely or substantially overlaps the reflecting surface of the elliptical mirror plate. After being reflected by the elliptical mirror plate, the light beam may be circularized via one or more shaping lenses disposed in the optical path of the reflected light beam, prior to projection of the light beam.

    MEMS DEVICE WITH ELLIPTICAL MIRROR

    公开(公告)号:US20220299758A1

    公开(公告)日:2022-09-22

    申请号:US17201804

    申请日:2021-03-15

    Applicant: GOOGLE LLC

    Abstract: Optical systems may include MEMS mirrors having elliptical mirror plates. A laser scanning system may include a MEMS mirror that scans an incident light beam along a single scanning axis. The MEMS mirror may include an elliptical mirror plate having a semi-major axis that is aligned parallel or perpendicular to the rotational axis of the elliptical mirror plate. The incident light beam may have an elliptical cross-section, such that the incident light beam completely or substantially overlaps the reflecting surface of the elliptical mirror plate. After being reflected by the elliptical mirror plate, the light beam may be circularized via one or more shaping lenses disposed in the optical path of the reflected light beam, prior to projection of the light beam.

    TECHNIQUE TO DETECT THE ROTATIONAL DIRECTION OF RESONANT MEMS MIRRORS DRIVEN BY PARAMETRIC EXCITATION

    公开(公告)号:US20220269069A1

    公开(公告)日:2022-08-25

    申请号:US17220265

    申请日:2021-04-01

    Applicant: GOOGLE LLC

    Inventor: Sangtak Park

    Abstract: A system to spatially modulate light includes an optical reflector to reflect the light. The optical reflector has an actuator that includes a stator and a rotor. The system further includes a controller in communication with the optical reflector. The controller is to drive the optical reflector by applying an excitation voltage between the rotor and the stator. Further, the controller is to apply a baseline voltage between the rotor and the stator, and to detect, during a voltage-off period of the excitation voltage, an induced current induced by the rotor moving relative to the stator. Furthermore, the controller is to determine a current attribute of the induced current and to determine a movement attribute of the optical reflector based on the current attribute.

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