公开(公告)号：US06812462B1

公开(公告)日：2004-11-02

申请号：US10435011

申请日：2003-05-09

申请人： Gabor D. Toth ,  John A. Notte, IV ,  Richard A. Price

发明人： Gabor D. Toth ,  John A. Notte, IV ,  Richard A. Price

IPC分类号： H01J3728

CPC分类号： H01J37/28 ,  H01J2237/281 ,  H01J2237/2814 ,  H01J2237/2815

摘要： Method and apparatus for imaging at multiple perspectives of a specimen are disclosed. In one embodiment, an apparatus for generating a multi-perspective image using multiple charged particle beams (e.g., electron beams) is disclosed. In one embodiment, the apparatus generally includes a charged particle beam generator system arranged to generate and control a first charged particle beam directed substantially at a first angle towards the specimen and a second charged particle beam directed substantially at a second angle towards the specimen. The apparatus also includes an image generator arranged to generate one or more images based on charged particles emitted from the specimen in response to the first and second charged particle beams and a controller arranged to cause the charged particle beam generator to direct both the first charged particle beam and the second charged particle beam at a first area of the specimen. In a specific implementation, the charged particles are in the form of electrons and the apparatus is a dual electron beam scanning electron microscope (SEM).

摘要翻译： 公开了用于在样本的多个观点进行成像的方法和装置。 在一个实施例中，公开了一种使用多个带电粒子束（例如电子束）产生多视角图像的装置。 在一个实施例中，装置通常包括带电粒子束发生器系统，其被布置成产生并控制基本上以第一角度朝向试样的第一带电粒子束和基本上以第二角度朝向试样的第二带电粒子束。 该装置还包括图像发生器，其被布置为响应于第一和第二带电粒子束而基于从样本发射的带电粒子产生一个或多个图像;以及控制器，布置成使带电粒子束发生器引导第一带电粒子 光束和第二带电粒子束在样品的第一区域。 在具体实施方案中，带电粒子是电子的形式，并且该装置是双电子束扫描电子显微镜（SEM）。