Abstract:
A supersonic compressor rotor and method of compressing a fluid is disclosed. The rotor includes a first and a second rotor disk, a first set and a second set of rotor vanes. The first set and second set of rotor vanes are coupled to and disposed between the first and second rotor disks. Further, the first set of rotor vanes are offset from the second set of rotor vanes. The rotor includes a first set of flow channels defined by the first set of rotor vanes disposed between the first and second rotor disks. Similarly, the rotor includes a second set of flow channels defined by the second set of rotor vanes disposed between the first and second rotor disks. Further, the rotor includes a compression ramp disposed on a rotor vane surface opposite to an adjacent rotor vane surface.
Abstract:
In some embodiments, a plenum of an apparatus for transferring energy between a rotating element and a fluid may include a through hole disposed through the plenum; a plurality of inlet guide vanes disposed proximate a peripheral edge of the through hole, the plurality of inlet guide vanes comprising a first group of inlet guide vanes having a symmetrical profile, a second group of inlet guide vanes, and a third group of inlet guide vanes, wherein each inlet guide vane of the second group and third group have a cambered profile, and wherein each inlet guide vane of the third group has a different cambered profile from each other inlet guide vane of the third group.
Abstract:
A gas manifold for single-nozzle deposition chambers comprising a base having a top surface and bottom surface defining a thickness; a primary nozzle having an inlet and outlet extending through the thickness of the base; and a secondary nozzle having an inlet extending partially through the top surface of the base and at least one channel extending a distance from a sidewall of the base having an outlet, the channel in fluid communication with the inlet of the secondary nozzle. The inlet of the primary nozzle has a hollow protrusion extending from the top surface of the base into the gas feed. The channel of the secondary nozzle includes a bend between the sidewall of the base and the outlet configured to pass between a first direct energy source and second direct energy source, the first energy source and second energy source disposed on a top wall of a chamber.
Abstract:
A gas manifold for single-nozzle deposition chambers comprising a base having a top surface and bottom surface defining a thickness; a primary nozzle having an inlet and outlet extending through the thickness of the base; and a secondary nozzle having an inlet extending partially through the top surface of the base and at least one channel extending a distance from a sidewall of the base having an outlet, the channel in fluid communication with the inlet of the secondary nozzle. The inlet of the primary nozzle has a hollow protrusion extending from the top surface of the base into the gas feed. The channel of the secondary nozzle includes a bend between the sidewall of the base and the outlet configured to pass between a first direct energy source and second direct energy source, the first energy source and second energy source disposed on a top wall of a chamber.
Abstract:
In some embodiments, a plenum of an apparatus for transferring energy between a rotating element and a fluid may include a through hole disposed through the plenum; a plurality of inlet guide vanes disposed proximate a peripheral edge of the through hole, the plurality of inlet guide vanes comprising a first group of inlet guide vanes having a symmetrical profile, a second group of inlet guide vanes, and a third group of inlet guide vanes, wherein each inlet guide vane of the second group and third group have a cambered profile, wherein each inlet guide vane of the second group has same cambered profile, and further wherein each inlet guide vane of the third group has a different cambered profile from each other inlet guide vane of the third group.
Abstract:
In some embodiments, a plenum of an apparatus for transferring energy between a rotating element and a fluid may include a through hole disposed through the plenum; a plurality of inlet guide vanes disposed proximate a peripheral edge of the through hole, the plurality of inlet guide vanes comprising a first group of inlet guide vanes having a symmetrical profile, a second group of inlet guide vanes, and a third group of inlet guide vanes, wherein each inlet guide vane of the second group and third group have a cambered profile, and wherein each inlet guide vane of the third group has a different cambered profile from each other inlet guide vane of the third group.
Abstract:
Embodiments of an apparatus for transferring energy between a rotating element and a fluid are provided herein. In some embodiments, a plenum of an apparatus for transferring energy between a rotating element and a fluid may include a through hole disposed through the plenum; and a plurality of inlet guide vanes disposed proximate a peripheral edge of the through hole, the plurality of inlet guide vanes comprising a first group of inlet guide vanes having a cambered profile and a second group of inlet guide vanes disposed radially inward of the first group of inlet guide vanes, wherein the first group of inlet guide vanes are in a fixed position with respect to the plenum and the second group of inlet guide vanes are movable with respect to the plenum.
Abstract:
A supersonic compressor rotor and method of compressing a fluid is disclosed. The rotor includes a first and a second rotor disk, a first set and a second set of rotor vanes. The first set and second set of rotor vanes are coupled to and disposed between the first and second rotor disks. Further, the first set of rotor vanes are offset from the second set of rotor vanes. The rotor includes a first set of flow channels defined by the first set of rotor vanes disposed between the first and second rotor disks. Similarly, the rotor includes a second set of flow channels defined by the second set of rotor vanes disposed between the first and second rotor disks. Further, the rotor includes a compression ramp disposed on a rotor vane surface opposite to an adjacent rotor vane surface.
Abstract:
Embodiments of an apparatus for transferring energy between a rotating element and a fluid are provided herein. In some embodiments, a plenum of an apparatus for transferring energy between a rotating element and a fluid may include a through hole disposed through the plenum; and a plurality of inlet guide vanes disposed proximate a peripheral edge of the through hole, the plurality of inlet guide vanes comprising a first group of inlet guide vanes having a cambered profile and a second group of inlet guide vanes disposed radially inward of the first group of inlet guide vanes, wherein the first group of inlet guide vanes are in a fixed position with respect to the plenum and the second group of inlet guide vanes are movable with respect to the plenum.