Apparatus for producing graphene and other 2D materials

    公开(公告)号:US10533264B1

    公开(公告)日:2020-01-14

    申请号:US15362146

    申请日:2016-11-28

    摘要: A 2D material such as graphene is produced on a forming sheet disposed on a carrier and exposed to a donor gas within a furnace. A first furnace surface is disposed immediately adjacent to and spaced apart from the forming sheet to define a volume. A purge gas is used to purge the volume of undesirable molecules, such as oxygen, and then a donor gas is introduced into the volume to supply an element or molecule necessary for the formation of a 2D material. Multiple carriers and forming sheets are moved in a train into the furnace during the presence of the donor gas, and each forming sheet is heated to a temperature sufficient to form 2D material on the sheet. The furnace is constructed of a nonreactive material, such as quartz, and the first furnace surface is provided by a quartz plate. Gas passageways and gas ports are formed in the quartz plate with the ports extending through the first furnace surface. The ports are disposed in patterns that facilitate the production of a smooth nonturbulent laminar flow of gas within the volume. As gases are introduced into the furnace, the gases are constrained but they escape and are collected by a surrounding gas chamber. Undesirable gases are purged and desirable gases are maintained in both the furnace and the gas chamber.