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    High efficiency field-sequential color projector using two SLMs
    4.
    发明授权
    High efficiency field-sequential color projector using two SLMs 失效
    使用两个SLM的高效率场序彩色投影机

    公开(公告)号：US5921650A

    公开(公告)日：1999-07-13

    申请号：US32494

    申请日：1998-02-27

    申请人： Fuad Elias Doany ,  Alan Edward Rosenbluth

    发明人： Fuad Elias Doany ,  Alan Edward Rosenbluth

    IPC分类号： H04N9/31 ,  G03B21/14

    CPC分类号： G02B27/283 ,  G02B26/008 ,  H04N9/3114 ,  G02B7/006

    摘要： A display is disclosed operating in a field-sequential color mode having first and second light valves which are simultaneously illuminated with different color beams having different polarizations provided from a color wheel. The light valves provide an image forming light to a projection lens for projecting the image forming light onto a screen. The wheel has front and back surfaces which are displaced from each other and have segments of different colors for separating a polarized white light into the simultaneous different color beams. A retardation film for converting the polarization of colors reflected from the back surface from a first polarization to a second polarization. The wheel is rotated for sequentially illuminating the light valves with different colors of different polarizations simultaneously. The display further includes a polarizing beam splitter assembly for directing the different color light beams from the wheel to the light valves and directing the image forming light to the projection lens. The polarizing beam splitter assembly includes a plurality of polarizing beam splitter sub-assemblies. A clean-up polarizer for absorbing the first or second polarizations is located between two halves of the polarizing beam splitter assembly.

    摘要翻译： 公开了以场顺序彩色模式操作的显示器，其具有由色轮提供的具有不同偏振度的不同颜色光束同时照明的第一和第二光阀。 光阀向投影透镜提供形成光的图像，用于将图像形成光投射到屏幕上。 车轮具有前后表面，它们彼此移位并且具有不同颜色的段，用于将偏振的白光分离成同时不同的颜色光束。 用于将从背面反射的颜色的偏振从第一偏振转换为第二偏振的延迟膜。 旋转轮子以顺序地照亮具有不同颜色的不同偏振的光阀同时进行。 显示器还包括偏振分束器组件，用于将来自轮的不同颜色的光束引导到光阀，并将图像形成光引导到投影透镜。 偏振分束器组件包括多个偏振分束器子组件。 用于吸收第一或第二偏振的清洁偏振器位于偏振分束器组件的两个半部之间。

    Apparatus for polarization conversion
    5.
    发明授权
    Apparatus for polarization conversion 失效
    极化转换装置

    公开(公告)号：US6064523A

    公开(公告)日：2000-05-16

    申请号：US106783

    申请日：1998-06-29

    申请人： Russell Alan Budd ,  Derek Brian Dove ,  Alan Edward Rosenbluth

    发明人： Russell Alan Budd ,  Derek Brian Dove ,  Alan Edward Rosenbluth

    IPC分类号： G02B5/30 ,  G02B27/28

    CPC分类号： G02B27/283 ,  G02B5/3025

    摘要： An apparatus for polarization conversion having a light source for supplying vertically and horizontally linearly polarized light to an optical path and a parabolic mirror disposed in the optical path and proximate to the light source. In different embodiments, the parabolic mirror has a mirror coating to induce a phase shift of 0.degree., 90.degree., or an arbitrary phase shift between incident light and reflected light. A polarizer, preferably a reflective polarizer film, is disposed in the optical path for reflecting light of one of the linear polarizations and for transmitting the other linear polarization. Lastly, one or more waveplates are disposed in the optical path between the polarizer and the parabolic mirror. The waveplates have opposing segments each having axes which are antiparallel to each other for recycling the reflected linear polarization by converting it to the transmitted polarization.

    摘要翻译： 一种用于偏振转换的装置，具有用于向光路提供垂直和水平线性偏振光的光源和设置在光路中并且靠近光源的抛物面镜。 在不同的实施例中，抛物面反射镜具有镜面涂层，以引起0°，90°的相移或入射光和反射光之间的任意相移。 偏振器，优选反射偏振膜，设置在光路中，用于反射线偏振之一的光，并用于透射另一线偏振。 最后，一个或多个波片设置在偏振器和抛物面镜之间的光路中。 波片具有各自具有彼此反平行的轴的相对的段，用于通过将反射的线偏振转换成透射的偏振来再循环反射的线偏振。

    Apparatus for polarization conversion
    6.
    发明授权
    Apparatus for polarization conversion 失效
    极化转换装置

    公开(公告)号：US06341038B1

    公开(公告)日：2002-01-22

    申请号：US09507996

    申请日：2000-02-22

    申请人： Russell Alan Budd ,  Derek Brian Dove ,  Alan Edward Rosenbluth

    发明人： Russell Alan Budd ,  Derek Brian Dove ,  Alan Edward Rosenbluth

    IPC分类号： G02B530

    CPC分类号： G02B27/283

    摘要： An apparatus for polarization conversion having a light source for supplying vertically and horizontally linearly polarized light to an optical path and a parabolic mirror disposed in the optical path and proximate to the light source. In different embodiments, the parabolic mirror has a mirror coating to induce a phase shift of 0°, 90°, or an arbitrary phase shift between incident light and reflected light. A polarizer means, preferably a reflective polarizer film, is disposed in the optical path for reflecting light of one of the linear polarizations and for transmitting the other linear polarization. Lastly, one or more waveplates are disposed in the optical path between the polarizer means and the parabolic mirror. The waveplates have opposing segments each having axes which are antiparallel to each other for recycling the reflected linear polarization by converting it to the transmitted polarization.

    摘要翻译： 一种用于偏振转换的装置，具有用于向光路提供垂直和水平线性偏振光的光源和设置在光路中并且靠近光源的抛物面镜。 在不同的实施例中，抛物面反射镜具有镜面涂层，以引起0°，90°的相移或入射光与反射光之间的任意相移。 在光路中设置偏振器装置，优选地是反射偏振片，用于反射线偏振之一的光，并用于透射另一线性偏振。 最后，一个或多个波片设置在偏振器装置和抛物面镜之间的光路中。 波片具有各自具有彼此反平行的轴的相对的段，用于通过将反射的线偏振转换成透射的偏振来再循环反射的线偏振。

    Apparatus and method for intensifying illumination brightness by time-superposing multiple pulsed light sources
    7.
    发明授权
    Apparatus and method for intensifying illumination brightness by time-superposing multiple pulsed light sources 失效

    公开(公告)号：US06193393B1

    公开(公告)日：2001-02-27

    申请号：US09151178

    申请日：1998-09-10

    申请人： Derek Brian Dove ,  Alan Edward Rosenbluth ,  Kei-Hsiung Yang

    发明人： Derek Brian Dove ,  Alan Edward Rosenbluth ,  Kei-Hsiung Yang

    IPC分类号： F21V2304

    CPC分类号： G02B27/141

    摘要： An illumination apparatus including: at least two light sources, in which each of the light sources produce independent light beams; a controller for sequentially driving each of the light sources at a high power above their respective maximum rated power, to produce a respective light beam for each light source, and for leaving the remaining light sources at a low power below their respective maximum rated power, such that the time-average of the high and low power levels are set to a predetermined value for each of the light sources; and a combiner and director for sequentially combining each of the light beams from their respective light sources while being driven at high power into a common output beam with a fixed direction. Various combiner and directors are disclosed including tiltable mirrors under the control of the controller as well as optical systems.

    Apparatus and method for intensifying illumination brightness by time-superposing multiple pulsed light sources
    8.
    发明授权
    Apparatus and method for intensifying illumination brightness by time-superposing multiple pulsed light sources 失效
    通过时间叠加多个脉冲光源来增强照明亮度的装置和方法

    公开(公告)号：US06332693B1

    公开(公告)日：2001-12-25

    申请号：US09657031

    申请日：2000-09-07

    申请人： Derek Brian Dove ,  Alan Edward Rosenbluth ,  Kei-Hsiung Yang

    发明人： Derek Brian Dove ,  Alan Edward Rosenbluth ,  Kei-Hsiung Yang

    IPC分类号： F21V2304

    CPC分类号： G02B27/141

    摘要： An illumination apparatus including: at least two light sources, in which each of the light sources produce independent light beams; a controller for sequentially driving each of the light sources at a high power above their respective maximum rated power, to produce a respective light beam for each light source, and for leaving the remaining light sources at a low power below their respective maximum rated power, such that the time-average of the high and low power levels are set to a predetermined value for each of the light sources; and a combiner and director for sequentially combining each of the light beams from their respective light sources while being driven at high power into a common output beam with a fixed direction. Various combiner and directors are disclosed including tiltable mirrors under the control of the controller as well as optical systems.

    摘要翻译： 一种照明装置，包括：至少两个光源，其中每个光源产生独立的光束; 用于以高于其各自的最大额定功率的高功率顺序地驱动每个光源的控制器，以产生用于每个光源的各个光束，并且将剩余的光源以低于它们各自的最大额定功率的低功率离开， 使得对于每个光源将高功率和低功率电平的时间平均值设置为预定值; 以及组合器和导向器，用于在以大功率驱动到具有固定方向的公共输出光束的情况下，顺序地组合来自它们各自的光源的每个光束。 公开了各种组合器和引导器，其包括在控制器的控制下的可倾斜的反射镜以及光学系统。

    Printing a mask with maximum possible process window through adjustment of the source distribution
    9.
    发明授权
    Printing a mask with maximum possible process window through adjustment of the source distribution 有权
    通过调整源分布打印具有最大可能过程窗口的面具

    公开(公告)号：US07363611B2

    公开(公告)日：2008-04-22

    申请号：US11377957

    申请日：2006-03-16

    申请人： Alan Edward Rosenbluth

    发明人： Alan Edward Rosenbluth

    IPC分类号： G06F17/50 ,  G03C5/00

    CPC分类号： G03F7/70125

    摘要： A lithographic mask is illuminated with light from different directions such that intensities of a plurality of incident beams of light provide a largest possible integrated process window defined in terms of an allowed range for defining shapes. Constrained sets of intensity parameters are imposed. A first set of intensity parameters represents maximum possible intensities that can be permitted for overexposed tolerance positions. A second set of intensity parameters represents minimum possible intensities that can be permitted for underexposed tolerance positions. Optimum source intensities of incident beams are defined using a linear program and constraints. The optimum source intensities maximize an integrated range of dose and focal variations without causing printed shapes to depart from the allowed range. Apparatus are detailed and variations are described.

    摘要翻译： 使用来自不同方向的光照射光刻掩模，使得多个入射光束的强度提供根据用于定义形状的允许范围限定的最大可能的集成处理窗口。 强制约束强度参数集。 第一组强度参数表示可能允许曝光过度公差位置的最大可能强度。 第二组强度参数表示可以允许曝光不足的公差位置的最小可能强度。 入射光束的最佳光源强度使用线性程序和约束来定义。 最佳的光源强度最大化剂量和焦点变化的集成范围，而不会使印刷形状偏离允许的范围。 详细描述装置并描述变型。