公开(公告)号：US08092607B2

公开(公告)日：2012-01-10

申请号：US12262434

申请日：2008-10-31

申请人： Gerd Pollack ,  Andrej Wolf ,  Matthias Klooss ,  Johannes Struempfel

发明人： Gerd Pollack ,  Andrej Wolf ,  Matthias Klooss ,  Johannes Struempfel

IPC分类号： C23C14/50 ,  C23C14/00 ,  B65G13/02 ,  B65G13/00 ,  C23C16/00

CPC分类号： C23C16/4587 ,  B65G49/061 ,  B65G49/063 ,  B65G2249/02

摘要： In a vacuum coating installation to coat planar substrates, comprising a vacuum chamber and a transport device arranged in the vacuum chamber for transporting the substrates along a transportation path through the vacuum chamber, with the transport device comprising a multitude of transport rollers arranged successively along the transportation path, each transport roller is adapted to be mounted at least at two different positions, vertically distanced from each other. A carrier frame has a substrate accepting structure and a guiding rod arranged at the bottom of the carrier frame in the direction of transportation to create a friction connection with the transportation device, connected to the carrier frame at the connection points, with the guiding rod being connected at least at one connection point to the carrier frame such that a relative displacement is possible of the guiding rod relative to the carrier frame in the direction of transportation.

摘要翻译： 在用于涂覆平面基板的真空涂布装置中，包括真空室和设置在真空室中的输送装置，用于沿着输送路径通过真空室输送基板，输送装置包括多个沿着 输送路径，每个输送辊适于至少安装在彼此垂直离开的两个不同位置处。 载体框架具有基板接收结构和引导杆，其在运输方向上布置在承载架的底部，以与传送装置形成摩擦连接，在连接点处连接到承载架，导杆为 至少在一个连接点处连接到承载架，使得导向杆相对于承载架在运输方向上的相对位移是可能的。