-
公开(公告)号：US09222733B2
公开(公告)日：2015-12-29
申请号：US13355309
申请日：2012-01-20
IPC分类号： B01J12/00 , B01J19/24 , C01B33/107 , F28F9/00 , F28D7/16 , F28F9/22 , B01J8/18 , C01B33/033
CPC分类号： F28F9/00 , B01J8/1836 , B01J12/00 , B01J19/24 , B01J2219/00081 , C01B33/033 , C01B33/1071 , F28D7/16 , F28F9/22 , F28F2275/205
摘要： Shell and tube heat exchangers that include a baffle arrangement that improves the temperature profile and flow pattern throughout the exchanger and/or that are integral with a reaction vessel are disclosed. Methods for using the exchangers including methods that involve use of the exchanger and a reaction vessel to produce a reaction product gas containing trichlorosilane are also disclosed.
摘要翻译： 公开了一种壳和管式热交换器，其包括改善整个交换器和/或与反应容器成一体的温度分布和流动模式的挡板装置。 还公开了使用交换器的方法，包括使用交换器和反应容器来生产含三氯硅烷的反应产物气体的方法。
-
公开(公告)号：US20120199324A1
公开(公告)日：2012-08-09
申请号：US13355309
申请日：2012-01-20
CPC分类号： F28F9/00 , B01J8/1836 , B01J12/00 , B01J19/24 , B01J2219/00081 , C01B33/033 , C01B33/1071 , F28D7/16 , F28F9/22 , F28F2275/205
摘要： Shell and tube heat exchangers that include a baffle arrangement that improves the temperature profile and flow pattern throughout the exchanger and/or that are integral with a reaction vessel are disclosed. Methods for using the exchangers including methods that involve use of the exchanger and a reaction vessel to produce a reaction product gas containing trichlorosilane are also disclosed.
摘要翻译： 公开了一种壳管式热交换器，其包括改善整个交换器和/或与反应容器成一体的温度分布和流动模式的挡板装置。 还公开了使用交换器的方法，包括使用交换器和反应容器来生产含三氯硅烷的反应产物气体的方法。
-
3.发明申请公开(公告)号：US20120199323A1
公开(公告)日：2012-08-09
申请号：US13355303
申请日：2012-01-20
CPC分类号： F28F9/00 , B01J8/1836 , B01J12/00 , B01J19/24 , B01J2219/00081 , C01B33/033 , C01B33/1071 , F28D7/16 , F28F9/22 , F28F2275/205
摘要： Shell and tube heat exchangers that include a baffle arrangement that improves the temperature profile and flow pattern throughout the exchanger and/or that are integral with a reaction vessel are disclosed. Methods for using the exchangers including methods that involve use of the exchanger and a reaction vessel to produce a reaction product gas containing trichlorosilane are also disclosed.
摘要翻译： 公开了一种壳和管式热交换器，其包括改善整个交换器和/或与反应容器成一体的温度分布和流动模式的挡板装置。 还公开了使用交换器的方法，包括使用交换器和反应容器来生产含三氯硅烷的反应产物气体的方法。
-
公开(公告)号：US20120322175A1
公开(公告)日：2012-12-20
申请号：US13493285
申请日：2012-06-11
CPC分类号： C23C16/24 , C01B33/035 , C23C16/4418 , C23C16/52
摘要： Systems and methods are provided for controlling silicon rod temperature. In one example, a method of controlling a surface temperature of at least one silicon rod in a chemical vapor deposition (CVD) reactor during a CVD process is presented. The method includes determining an electrical resistance of the at least one silicon rod, comparing the resistance to a set point to determine a difference, and controlling a power supply to control a power output coupled to the at least one silicon rod to minimize an absolute value of the difference.
摘要翻译： 提供了用于控制硅棒温度的系统和方法。 在一个示例中，呈现了在CVD过程期间控制化学气相沉积（CVD）反应器中的至少一个硅棒的表面温度的方法。 该方法包括确定至少一个硅棒的电阻，将电阻与设定点进行比较以确定差异，以及控制电源以控制耦合到所述至少一个硅棒的功率输出以使绝对值最小化 的区别。
-
公开(公告)号：US20110250366A1
公开(公告)日：2011-10-13
申请号：US13084243
申请日：2011-04-11
CPC分类号： C23C16/46 , C01B33/035 , C23C16/4418 , F27B11/00 , Y10T29/49826
摘要： A bell jar for a Siemens reactor of the type used to deposit polycrystalline silicon on a plurality of heated silicon rods via chemical vapor deposition process. The bell jar includes a thermally conductive inner wall having an interior surface at least partially defining an interior space adapted to receive the plurality of heated silicon rods therein. A thermal radiation shield is in the interior space generally adjacent to and in opposing relationship with the interior surface of the inner wall. The thermal radiation shield is substantially opaque to thermal radiation emitted from the plurality of heated silicon rods in the interior space of the bell jar.
摘要翻译： 用于通过化学气相沉积工艺在多个加热的硅棒上沉积多晶硅的类型的西门子反应器的钟罩。 钟罩包括导热内壁，其具有至少部分地限定适于在其中容纳多个加热的硅棒的内部空间的内表面。 热辐射屏蔽件在内部空间中大体上与内壁的内表面相邻并且与内壁的内表面相反。 热辐射屏蔽对于从钟罩的内部空间中的多个加热的硅棒发射的热辐射基本上是不透明的。
-
-
-
-
搜索结果
5 条记录 (耗时 0.013 秒)
