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公开(公告)号：US20220158411A1
公开(公告)日：2022-05-19
申请号：US17666656
申请日：2022-02-08
申请人： Gigaphoton Inc.
发明人： Atsushi FUCHIMUKAI , Chen QU
摘要： In a laser system according to an aspect of the present disclosure, the following components are disposed: a first container that accommodates a first heater and a first crystal holder holding a first nonlinear crystal and includes a first light incident window via which laser light is incident and a first light exit window via which the laser light exits; a second container that accommodates a second heater and a second crystal holder holding a second nonlinear crystal and includes a second light incident window via which the laser light is incident and a second light exit window via which the laser light exits; and a stage that holds the first and second containers. A controller controls the stage to move the first nonlinear crystal away from the optical path of the laser light and inserts the second nonlinear crystal into the optical path of the laser light.
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公开(公告)号：US20240364076A1
公开(公告)日：2024-10-31
申请号：US18766837
申请日：2024-07-09
申请人： Gigaphoton Inc.
发明人： Chen QU , Taisuke MIURA
CPC分类号： H01S5/0611 , H01S5/0654 , H01S5/50
摘要： A laser system includes a first semiconductor laser device configured to output first CW laser light, a first semiconductor optical amplification device configured to amplify the first CW laser light and output second CW laser light, an optical parametric amplification device configured to amplify the second CW laser light and output first pulse laser light, and a wavelength conversion device configured to perform wavelength conversion on the first pulse laser light and output second pulse laser light in a deep ultraviolet wavelength region.
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公开(公告)号：US20220155650A1
公开(公告)日：2022-05-19
申请号：US17666607
申请日：2022-02-08
申请人： Gigaphoton Inc.
发明人： Chen QU , Hironori IGARASHI , Atsushi FUCHIMUKAI
摘要： A wavelength conversion system according to an aspect of the present disclosure includes a first crystal holder holding a first non-linear crystal, a second crystal holder holding a second non-linear crystal, a third crystal holder holding a third non-linear crystal, and a container housing the holders. The container has an entrance window and an emission window. The first non-linear crystal, the second non-linear crystal, and the third non-linear crystal are disposed in this order on an optical path of a laser beam traveling from the entrance window to the emission window. The crystal holders are rotatable. A first rotational axis that is a rotational axis of the first crystal holder is orthogonal to a second rotational axis that is a rotational axis of the second crystal holder, and the first rotational axis is parallel to a third rotational axis that is a rotational axis of the third crystal holder.
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4.发明公开公开(公告)号：US20230178957A1
公开(公告)日：2023-06-08
申请号：US18164376
申请日：2023-02-03
申请人： Gigaphoton Inc.
发明人： Yohei TANAKA , Chen QU
CPC分类号： H01S3/109 , G02F1/37 , H01S3/0092 , G02F1/3544 , H01S3/025
摘要： A solid-state laser system according to an aspect of the present disclosure includes a first non-linear crystal that generates first wavelength-converted light based on a first laser beam, a first adjustment unit configured to perform phase matching of the first wavelength-converted light in the first non-linear crystal, a second non-linear crystal that generates second wavelength-converted light based on a second laser beam and the first wavelength-converted light, a second adjustment unit configured to perform phase matching of the second wavelength-converted light in the second non-linear crystal, a light detection unit configured to detect light having a selected wavelength, and a processor configured to control the first adjustment unit based on intensity of at least one of the first wavelength-converted light and the first laser beam and to control the second adjustment unit based on intensity of at least one of the second wavelength-converted light and the first wavelength-converted light.
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公开(公告)号：US20220158402A1
公开(公告)日：2022-05-19
申请号：US17666471
申请日：2022-02-07
申请人： Gigaphoton Inc.
发明人： Yohei TANAKA , Chen QU , Atsushi FUCHIMUKAI
摘要： A wavelength conversion apparatus according to an aspect of the present disclosure is a wavelength conversion apparatus that performs wavelength conversion of light through a non-linear crystal and including a first non-linear crystal, a container in which the first non-linear crystal is housed, a crystal holding member provided inside the container for fixing the first non-linear crystal, a first window provided to the container for guiding light to the first non-linear crystal from outside of the container, a second window provided to the container for guiding light output from the first non-linear crystal to outside of the container, a first heater provided inside the container for heating the first non-linear crystal, a battery that supplies electric power to the first heater, and a first controller that controls electric power supply to the first heater.
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