公开(公告)号：US11194255B2

公开(公告)日：2021-12-07

申请号：US16812784

申请日：2020-03-09

Applicant: Gigaphoton Inc.

Inventor： Koji Kakizaki ,  Masakazu Kobayashi ,  Akira Suwa ,  Osamu Wakabayashi

IPC: G03F7/20 ,  H01S3/11 ,  H01S3/225 ,  G03F9/00

Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.

公开(公告)号：US12166329B2

公开(公告)日：2024-12-10

申请号：US17396928

申请日：2021-08-09

Applicant: National University Corporation Nagaoka University of Technology ,  Gigaphoton Inc.

Inventor： Weihua Jiang ,  Hiroshi Umeda ,  Koji Kakizaki

IPC: H01S3/13 ,  H01S3/091 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0973 ,  H01S3/0975 ,  H01S3/131 ,  G03F7/00 ,  G03F7/20 ,  H01F27/24 ,  H01F27/28 ,  H01S3/225

Abstract: A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.

公开(公告)号：US11604416B2

公开(公告)日：2023-03-14

申请号：US17511128

申请日：2021-10-26

Applicant: Gigaphoton Inc.

Inventor： Koji Kakizaki ,  Masakazu Kobayashi ,  Akira Suwa ,  Osamu Wakabayashi

IPC: G03F7/20 ,  H01S3/11 ,  H01S3/225 ,  G03F9/00

Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.