公开(公告)号：US20220190540A1

公开(公告)日：2022-06-16

申请号：US17686327

申请日：2022-03-03

Applicant: Gigaphoton Inc.

Inventor： Hiroaki TSUSHIMA ,  Yousuke KAWAGOE ,  Makoto TANAKA

IPC: H01S3/00 ,  H01S3/036 ,  G01M3/04 ,  G01M3/32

Abstract: A leak check method for a laser device includes exposing a closed space accommodating laser medium gas to the atmosphere, isolating the closed space from the atmosphere after exposing the closed space to the atmosphere, introducing neon-containing gas containing neon gas to the closed space, and determining whether or not the neon gas is leaking to outside of the closed space.

公开(公告)号：US20210367390A1

公开(公告)日：2021-11-25

申请号：US17398161

申请日：2021-08-10

Applicant: Gigaphoton Inc.

Inventor： Daisuke TEI ,  Osamu WAKABAYASHI ,  Makoto TANAKA ,  Miwa IGARASHI

IPC: H01S3/036 ,  G03F7/20 ,  H01S3/041

Abstract: A gas laser apparatus may include a chamber filled with a laser gas; a window provided in the chamber and through which a laser beam passes; an optical path tube connected to the chamber to surround a position of the window in the chamber; a heated gas supply port configured to supply a heated purge gas into a closed space including a space in the optical path tube; and an exhaust port configured to exhaust a gas in the closed space.

公开(公告)号：US20220091515A1

公开(公告)日：2022-03-24

申请号：US17457514

申请日：2021-12-03

Applicant: Gigaphoton Inc.

Inventor： Makoto TANAKA ,  Yosuke Fujimaki ,  Takashi Ito ,  Yousuke Kawagoe

IPC: G03F7/20 ,  H01S3/036 ,  F04D23/00 ,  F04D29/66

Abstract: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.