公开(公告)号：US20220190540A1

公开(公告)日：2022-06-16

申请号：US17686327

申请日：2022-03-03

Applicant: Gigaphoton Inc.

Inventor： Hiroaki TSUSHIMA ,  Yousuke KAWAGOE ,  Makoto TANAKA

IPC: H01S3/00 ,  H01S3/036 ,  G01M3/04 ,  G01M3/32

Abstract: A leak check method for a laser device includes exposing a closed space accommodating laser medium gas to the atmosphere, isolating the closed space from the atmosphere after exposing the closed space to the atmosphere, introducing neon-containing gas containing neon gas to the closed space, and determining whether or not the neon gas is leaking to outside of the closed space.