公开(公告)号：US12076692B1

公开(公告)日：2024-09-03

申请号：US18533316

申请日：2023-12-08

Applicant: GlobalFoundries U.S. Inc.

Inventor： Justin M. Weinstein

IPC: B01D53/90 ,  B01D53/86

CPC classification number: B01D53/90 ,  B01D53/8696 ,  B01D2251/102 ,  B01D2251/11 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2042 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/406 ,  B01D2257/553 ,  B01D2257/556 ,  B01D2258/0216

Abstract: A system to abate an emission from a first semiconductor process is disclosed. The system includes an abatement apparatus, such as a gas scrubber, to remove hazardous and toxic gas species from the emission. The abatement apparatus may combust the emission to remove these gas species using a fuel and oxidant. The system includes a fuel assembly fluidly coupled to the abatement apparatus which transmits the fuel from at least one source through the abatement apparatus. The fuel assembly may include a supply tank which contains a volume of fuel, a recovery apparatus which recovers and contains a recovery volume of fuel from a second semiconductor process, and a mass flow controller which may transmit fuel from at least one of the supply tank and the recovery apparatus through the abatement apparatus.

公开(公告)号：US12121855B1

公开(公告)日：2024-10-22

申请号：US18607331

申请日：2024-03-15

Applicant: GlobalFoundries U.S. Inc.

Inventor： Justin M. Weinstein

IPC: B01D53/75 ,  B01D53/04 ,  B01D53/26 ,  B01D53/34 ,  B01D53/81 ,  B01D53/86 ,  C23C16/44

CPC classification number: B01D53/75 ,  B01D53/0438 ,  B01D53/261 ,  B01D53/346 ,  B01D53/81 ,  B01D53/8631 ,  B01D53/8696 ,  C23C16/4412 ,  B01D2251/602 ,  B01D2253/106 ,  B01D2255/1021 ,  B01D2255/1025 ,  B01D2255/9155 ,  B01D2257/402 ,  B01D2257/553 ,  B01D2257/80 ,  B01D2258/0216

Abstract: A system to abate an emission stream from a semiconductor manufacturing process is disclosed. The system includes a plurality of sections configured to pass an emission stream therethrough. The sections include a metal oxide media section to remove a hydride from the emission stream; a desiccate media section downstream to the metal oxide media section to remove moisture from the emission stream; and a catalytic media section downstream to the desiccate media section to remove a nitrogen oxide (NOx) from the emission stream. The abatement system provides carbon-free abatement of nitrogen oxide and hydride(s). The abatement system has significantly lower cost to manufacture and operate.