公开(公告)号：US20180359571A1

公开(公告)日：2018-12-13

申请号：US15781364

申请日：2015-12-14

Applicant: Goertek Inc.

Inventor： Junkai ZHAN ,  Mengjin CAI ,  Guanxun QIU ,  Zonglin ZHOU ,  Qinglin SONG

IPC: H04R19/04 ,  B81C1/00 ,  B81B7/00 ,  H04R31/00

CPC classification number: H04R19/04 ,  B81B7/0029 ,  B81B7/02 ,  B81B2201/0257 ,  B81B2201/0292 ,  B81C1/00158 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003

Abstract: An acoustic sensor integrated MEMS microphone structure and a fabrication method thereof. A diaphragm (3e) and back-pole (7) which forms a condenser structure are formed on a substrate (1) having at least one recessed slot (1a) on the top. A sensitive electrode is formed on the substrate (1), the sensitive electrode comprising a fixed portion (3b) fixed on the substrate (1) via a sacrificial layer (2), and a bending portion (3a) inserted into the recessed slot (1a), wherein the bending portion and the side wall of the recessed slot form the condenser structure. The integrated structure integrates the condenser structure of the microphone and condenser structure of the acoustic sensor on a substrate (1), thereby increasing the integration level thereof and reducing the overall size of the package. Meanwhile, the microphone diaphragm (3e) and the sensitive electrode of the acoustic sensor can be fabricated on a same substrate (1) at the same time, from the same material, and using the same fabricating process to increase production efficiency.

公开(公告)号：US20200241407A1

公开(公告)日：2020-07-30

申请号：US16483156

申请日：2017-02-06

Applicant: GOERTEK INC.

Inventor： Zhe WANG ,  Quanbo ZOU ,  Qinglin SONG ,  Jialiang YAN ,  Yujing LIN ,  Xiaoyang ZHANG

IPC: G03B21/20 ,  G02B26/08 ,  G02B26/10

Abstract: A micro laser diode projector comprises: an MEMS scanning device, which rotates around a first axis and a second axis that are orthogonal to each other; and a micro laser diode light source including at least one micro laser diode, wherein the micro laser diode light source is mounted on the MEMS scanning device and rotates around the first and second axes with the MEMS scanning device to project light to a projection screen. An electronics apparatus including the micro laser diode projector is also discussed.