公开(公告)号：US5596144A

公开(公告)日：1997-01-21

申请号：US511215

申请日：1995-08-04

Applicant: Gregory D. Swanson

Inventor： Gregory D. Swanson

IPC: G01P15/12 ,  G01P15/13 ,  G01P15/125

CPC classification number: G01P15/123 ,  G01P15/131 ,  G01P2015/0828

Abstract: A motion sensor is provided for sensing motion or acceleration of a body, such as an accelerometer for use in an on-board automotive safety control system or navigational system. The motion sensor is a piezoresistive motion sensor that operates in a closed loop force rebalance mode. As such, the motion sensor may be considered a hybrid of piezoresistive sensors and capacitive force rebalance sensors. The sensor achieves this novel combination through a mechanically-biased proof mass that enables-the use of a single electrode for maintaining the proof mass in a null position during the operation of the sensor.

Abstract translation: 提供了用于感测身体的运动或加速度的运动传感器，例如用于车载汽车安全控制系统或导航系统的加速度计。 运动传感器是在闭环力重新平衡模式下运行的压阻运动传感器。 因此，运动传感器可以被认为是压阻传感器和电容力重新平衡传感器的混合。 传感器通过机械偏置的质量检测器实现了这种新颖的组合，其能够在传感器的操作期间使用单个电极将检测质量保持在零位置。