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1.发明授权Microelectromechanical integrated sensor structure with rotary driving motion 有权具有旋转驱动运动的微机电一体化传感器结构公开(公告)号：US07694563B2
公开(公告)日：2010-04-13
申请号：US11684243
申请日：2007-03-09
CPC分类号： G01C19/5712
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a first sensing mass is connected to the driving mass via elastic supporting elements so as to perform a first detection movement in a presence of a first external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the first sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the first sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the first detection movement. A second sensing mass is connected to the driving mass so as to perform a second detection movement in a presence of a second external stress. A first movement is a rotation about an axis lying in a plane, and a second movement is a linear movement along an axis of the plane.
摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且第一感测质量块通过弹性支撑元件连接到驱动质量块，以便在存在第一外部部件的情况下执行第一检测运动 强调。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内设有开口，第一传感块布置在开口内。 弹性支撑和锚固元件使得第一感测质量在旋转运动中固定到驱动质量块，并且在第一检测运动中基本上与驱动质量分离。 第二感测质量体连接到驱动质量块，以便在存在第二外部应力的情况下执行第二检测运动。 第一运动是围绕位于平面中的轴的旋转，并且第二运动是沿着平面的轴线的线性运动。
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2.发明授权Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes 有权微机电传感器具有改进的感测和驱动模式的机械去耦公开(公告)号：US08042396B2
公开(公告)日：2011-10-25
申请号：US12208980
申请日：2008-09-11
CPC分类号： G01C19/5712 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0828
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.
摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块被锚固到通过第一弹性锚固元件沿着旋转轴线布置的第一锚固件。 驱动质量体还连接到位于其外部的一对另外的锚固件，并且通过另外的弹性锚定元件相对于第一锚固件相对于相对侧联接; 弹性支撑元件和第一和另外的弹性锚固元件使得驱动质量在旋转运动中固定到第一感测块，并且在检测运动中基本上与感测质量分离，检测运动是围绕位于 一架飞机。
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3.发明申请公开(公告)号：US20090100930A1
公开(公告)日：2009-04-23
申请号：US12208977
申请日：2008-09-11
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0828
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.
摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内提供一个开口，并且传感块布置在开口内。 弹性支撑和锚固元件使得感测质量在旋转运动中固定到驱动质量块，并且在检测运动中基本上与驱动质量分离。 检测运动是围绕位于平面中的轴的旋转。 在平面图中，感测质量具有非矩形形状; 特别地，感测质量具有径向几何形状，并且在平面图中是径向环形扇区的整体形状。
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4.发明申请MICROELECTROMECHANICAL SENSOR WITH IMPROVED MECHANICAL DECOUPLING OF SENSING AND DRIVING MODES 有权具有改进的感应和驱动模式的机械解耦的微电子传感器公开(公告)号：US20090064780A1
公开(公告)日：2009-03-12
申请号：US12208980
申请日：2008-09-11
IPC分类号： G01P15/14
CPC分类号： G01C19/5712 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0828
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.
摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块被锚固到通过第一弹性锚固元件沿着旋转轴线布置的第一锚固件。 驱动质量体还连接到位于其外部的一对另外的锚固件，并且通过另外的弹性锚定元件相对于第一锚固件相对于相对侧联接; 弹性支撑元件和第一和另外的弹性锚固元件使得驱动质量在旋转运动中固定到第一感测块，并且在检测运动中基本上与感测质量分离，检测运动是围绕位于 一架飞机。
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5.发明授权公开(公告)号：US08042394B2
公开(公告)日：2011-10-25
申请号：US12208977
申请日：2008-09-11
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0828
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.
摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块通过弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内提供一个开口，并且传感块布置在开口内。 弹性支撑和锚固元件使得感测质量在旋转运动中固定到驱动质量块，并且在检测运动中基本上与驱动质量分离。 检测运动是围绕位于平面中的轴的旋转。 在平面图中，感测质量具有非矩形形状; 特别地，感测质量具有径向几何形状，并且在平面图中是径向环形扇区的整体形状。
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