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1.发明申请Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography 失效用于在极紫外光中产生光并用于用于极紫外光刻的光源的装置公开(公告)号：US20060039435A1
公开(公告)日：2006-02-23
申请号：US11151696
申请日：2005-06-13
申请人： Guy Cheymol , Philippe Cormont , Pierre-Yves Thro , Olivier Sublemontier , Martin Schmidt , Benoit Barthod
发明人： Guy Cheymol , Philippe Cormont , Pierre-Yves Thro , Olivier Sublemontier , Martin Schmidt , Benoit Barthod
CPC分类号： G03F7/70166 , B82Y10/00 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.
摘要翻译： 该装置包括用于在激光束（1）被聚焦的抽空空间中产生基本上线性的目标（4）的装置（2），所述目标适合于与聚焦的激光束（1）相互作用以发射等离子体发射辐射 在极紫外线。 接收机装置（3）在与聚焦激光束（1）相互作用后接收目标（4），并且收集装置（110）收集目标（4）发射的EUV辐射。 用于将激光束聚焦在靶（4）上的聚焦元件（11）以这样一种方式被布置，使得激光束（1）横向聚焦在靶（4）上，相对于 目标（4）并相对于垂直于目标（4）的平均收集轴线（6）以确定的角度倾斜在约60°至约90°的范围内。 收集器装置（110）围绕包含聚焦在目标（4）上的激光束（1）的半空间中的平均收集轴线（6）对称地设置在以平均收集轴线为中心的锥形空间（8）内部 （6）具有位于目标（4）处的顶点，并且在顶点处的半角小于聚焦激光束（1）相对于平均收集轴线（6）的倾斜角度。 该器件适合用作光刻用于制造集成电路的EUV辐射源。
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2.发明授权Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography 失效用于在极紫外光中产生光并用于用于极紫外光刻的光源的装置公开(公告)号：US07399981B2
公开(公告)日：2008-07-15
申请号：US11151696
申请日：2005-06-13
申请人： Guy Cheymol , Philippe Cormont , Pierre-Yves Thro , Olivier Sublemontier , Martin Schmidt , Benoit Barthod
发明人： Guy Cheymol , Philippe Cormont , Pierre-Yves Thro , Olivier Sublemontier , Martin Schmidt , Benoit Barthod
IPC分类号： H05G2/00
CPC分类号： G03F7/70166 , B82Y10/00 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.
摘要翻译： 该装置包括用于在激光束（1）被聚焦的抽空空间中产生基本上线性的目标（4）的装置（2），所述目标适合于与聚焦的激光束（1）相互作用以发射等离子体发射辐射 在极紫外线。 接收机装置（3）在与聚焦激光束（1）相互作用后接收目标（4），并且收集装置（110）收集目标（4）发射的EUV辐射。 用于将激光束聚焦在靶（4）上的聚焦元件（11）以这样一种方式被布置，使得激光束（1）横向聚焦在靶（4）上，相对于 目标（4）并相对于垂直于目标（4）的平均收集轴线（6）以确定的角度倾斜在约60°至约90°的范围内。 收集器装置（110）围绕包含聚焦在目标（4）上的激光束（1）的半空间中的平均收集轴线（6）对称地设置在以平均收集轴线为中心的锥形空间（8）内部 （6）具有位于目标（4）处的顶点，并且在顶点处的半角小于聚焦激光束（1）相对于平均收集轴线（6）的倾斜角度。 该器件适合用作光刻用于制造集成电路的EUV辐射源。
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公开(公告)号：US07515687B2
公开(公告)日：2009-04-07
申请号：US11618315
申请日：2006-12-29
申请人： Roland Bernard , Benoit Barthod
发明人： Roland Bernard , Benoit Barthod
IPC分类号： H01J35/00
CPC分类号： F04D19/042 , H01J35/103 , H01J35/106 , H01J35/14 , H01J35/20 , H01J35/26
摘要： Provided is a device for the emission of X-rays. The device includes a vacuum pump including a sealed peripheral casing containing a cathode which emits a flux of electrons, a rotary anode mounted at the end of the shaft of the vacuum pump, a collection device for collecting an emitted electron beam and at least one cooling element, disposed opposite one of the main radial faces of the rotary anode, which is fixed to one of the vacuum pump stator or to the sealed peripheral casing.
摘要翻译： 提供了用于发射X射线的装置。 该装置包括一个真空泵，该真空泵包括一个包含一个发射电子束的阴极的密封的外壳，一个安装在真空泵的轴端的旋转阳极，一个收集发射的电子束的收集装置和至少一个冷却 元件，设置在旋转阳极的一个主径向面上，其固定到真空泵定子之一或密封的外围壳体。
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公开(公告)号：US6050793A
公开(公告)日：2000-04-18
申请号：US90159
申请日：1998-06-04
CPC分类号： F04C27/009 , F04C18/0215 , F04C29/0021 , F04C29/0057 , F04C23/008
摘要： The machine includes a fixed disk (2) comprising a spiral wall (3), a mobile disk (4) also comprising a spiral wall (5) cooperating with that of the fixed disk, and means (11, 16, 22, 23) for driving circular translation movement of the mobile disk, the mobile disk being positioned axially by a system including a shoe (25, 32, 36) rubbing between two lateral abutments (26, 27-34, 35-39, 40), one member of the pair of members (i.e. the shoe or the lateral abutments, being attached to a fixed frame (1) and the other member of this pair of members being fastened to the mobile disk (4), characterized in that the fixed disk (2) is joined on the side opposite the mobile disk (4) to a fixed central shaft (7) joined to the frame (1) and including a discharge passage (8), the central shaft (7) being surrounded by a sealing bellows (12) connected at one end to the frame and at its other end to a connecting flange (10, 10A) the periphery of which, around the fixed disk (2), is joined to the mobile disk (4) beyond its spiral wall (5), the mobile disk (4) and the flange (10, 10A) forming a casing enclosing the fixed disk (2), the space (13) between the bellows (12) and the central shaft (7) constituting a suction passage, and in that the mobile disk axial positioning system is external of the internal volume of the casing (4-10, 10A), the member attached to the mobile disk, i.e. the shoe or the lateral abutments, being attached to the casing and projecting externally of it.
摘要翻译： 该机器包括一个包括螺旋壁（3）的固定盘（2），还包括与固定盘配合的螺旋壁（5）的移动盘（4）和装置（11,16,22,23） 为了驱动移动盘的圆形平移运动，移动盘由包括在两个侧向邻接件（26,27-34,35-39,40）之间摩擦的鞋（25,32,36）的系统轴向定位，一个构件 的一对构件（即，鞋或侧向邻接件）附接到固定框架（1），并且该对构件的另一构件紧固到移动盘（4），其特征在于，固定盘（2 ）在与移动盘（4）相对的一侧连接到连接到框架（1）的固定中心轴（7）并且包括排出通道（8），中心轴（7）被密封波纹管（ 12），其一端连接到所述框架，并且在另一端连接到连接凸缘（10,10A），所述连接凸缘的周边围绕所述固定盘（2）连接到所述移动体 e盘（4）超过其螺旋壁（5），移动盘（4）和凸缘（10,10A）形成封闭固定盘（2）的壳体，波纹管（12）和 所述中心轴（7）构成吸入通道，并且所述移动盘轴向定位系统位于所述壳体（4-10,10A）的内部容积的外侧，所述构件附接到所述移动盘，即所述鞋或 侧向邻接，附接到壳体并在其外部突出。
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公开(公告)号：US20050072942A1
公开(公告)日：2005-04-07
申请号：US10946109
申请日：2004-09-22
申请人： Benoit Barthod , Jean-Luc Rival , Matthieu Morpain
发明人： Benoit Barthod , Jean-Luc Rival , Matthieu Morpain
IPC分类号： G21K5/00 , G03F7/20 , G21K5/02 , G21K5/08 , H01L21/027 , H05G1/00 , H05G2/00 , H01J49/00 , G01J1/00
摘要： The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II-II) extending transversely relative to an optical axis (I-I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I-I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2 in the transmission chamber (2) that is well below the pressure P1 in the irradiation chamber (1). The low pressure in the transmission chamber (2) ensures that the EUV radiation is transmitted with little attenuation to a zone of use, without requiring voluminous high speed pumps (11, 12).
摘要翻译： 本发明的EUV辐射源包括含有照射区域（3）的照射室（1），其中产生辐射发生器材料流，例如沿着横向相对延伸的方向（II-II）传播的氙气流 到光轴（II）。 照射区域（3）处于与光轴（I-I）相对的隔膜（4）附近，并且使照射室（1）与透射室（2）连通。 功率激光束（5,6）在照射区域（3）中撞击辐射发生器材料流，并产生通过隔膜（4）传播的EUV辐射，并通过椭圆镜（2）调节在传输室（2） 13）。 差压泵（11,12）保持传动室（2）中的压力P2远低于照射室（1）中的压力P1。 传输室（2）中的低压力确保了EUV辐射以很少的衰减传播到使用区域，而不需要大容量的高速泵（11,12）。
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公开(公告)号：US6027317A
公开(公告)日：2000-02-22
申请号：US90148
申请日：1998-06-04
CPC分类号： F04C18/0215 , F04C27/009 , F04C29/0021 , F04C29/0057 , F04C23/008
摘要： A scroll type machine including a fixed disk (5) comprising a spiral working wall (6) and a mobile disk (7) equally comprising a spiral working wall (8) cooperating with that of the fixed disk, means for driving circular translation movement of the mobile disk, a sealing bellows (15) joined at one end to a member (14) fixed with respect to the circular translation movement of the mobile disk (7) and at its other end to a fixed part (1C) of the machine, said bellows (15) separating the fluid circuit from the mechanical parts driving the mobile disk, characterized in that the fixed disk (5) is joined on the side opposite the mobile disk (7) to a fixed central shaft (10) including a discharge passage (11), said central shaft being surrounded by said bellows (15), the space (16) between said bellows and said fixed central shaft constituting a suction passage, in that a hollow main rotary shaft (19) surrounds said bellows (15) and is carried by at least one bearing (23, 24-32) in a fixed frame (1), one end of said main shaft (19) including an eccentric circular bore (18) cooperating with a drive member (14) joined to the mobile disk (7), said drive means including an electric motor rotor (25) joined to said main rotary shaft (19) and surrounding it and a fixed stator (26) surrounding said rotor.
摘要翻译： 一种涡旋式机器，包括固定盘（5），其包括螺旋形工作壁（6）和移动盘（7），该移动盘等同地包括与固定盘配合的螺旋形工作壁（8），用于驱动圆形平移运动的装置 移动盘，密封波纹管（15），其一端连接到相对于所述移动盘（7）的圆形平移运动固定的构件（14），并且在另一端连接到所述机器的固定部分（1C） ，所述波纹管（15）将流体回路与驱动移动盘的机械部件分开，其特征在于，固定盘（5）在与移动盘（7）相对的一侧与固定的中心轴（10）接合，固定的中心轴（10） 排出通道（11），所述中心轴由所述波纹管（15）围绕，所述波纹管和所述固定中心轴之间的空间（16）构成吸入通道，空心主旋转轴（19）围绕所述波纹管 15），并由固定的fr中的至少一个轴承（23,24-32）承载 （1），所述主轴（19）的一端包括与连接到所述活动盘（7）的驱动构件（14）配合的偏心圆形孔（18），所述驱动装置包括电动机转子（25） 连接到所述主旋转轴（19）并围绕它，以及围绕所述转子的固定定子（26）。
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公开(公告)号：US5370508A
公开(公告)日：1994-12-06
申请号：US217054
申请日：1994-03-24
CPC分类号： F04C15/008 , F04C2/10
摘要： The machine includes a piston which is cylindrical in the mathematical sense, which has an axis .DELTA..sub.p, which is rotary, and which is situated in a cylindrical casing that has an axis .DELTA..sub.c, the piston having an outline that has .DELTA..sub.p axes of symmetry, the casing delimiting a hollow volume whose cross-section in a plane perpendicular to its axis .DELTA..sub.c has S.sub.c axes of symmetry, S.sub.p and S.sub.c differing from each other by unity. The axes .DELTA..sub.p and .DELTA..sub.c are parallel and are separated by a distance E, the piston and the casing delimiting at least three chambers between them, and the casing including at least one suction inlet and one delivery outlet. The positive-displacement machine further includes a ferromagnetic sprocket which has an axis .DELTA..sub.p, which is secured to the piston, which has N.sub.p teeth, and which is disposed inside a ferromagnetic toothed ring which has an axis .DELTA..sub.c and which is secured to the casing, the toothed ring being provided with N.sub.B electrical windings disposed radially, wherein the ratio N.sub.p /N.sub.B is equal to the ratio S.sub.p /S.sub.c, and wherein the N.sub.B electrical windings of the toothed ring are powered successively.
摘要翻译： 该机器包括在数学意义上为圆柱形的活塞，该活塞具有旋转的轴线DELTA p，并且位于具有轴线DELTA c的圆柱形壳体中，活塞具有DELTA p轴的轮廓 对称性，外壳限定中空体积，其垂直于其轴线DELTA c的平面中的横截面具有Sc对称性，Sp和Sc彼此不一致。 轴DELTA p和DELTA c是平行的，并且分开距离E，活塞和壳体在它们之间限定至少三个室，并且壳体包括至少一个吸入口和一个输送出口。 正排量机还包括铁磁链轮，其具有轴线DELTA p，其固定到具有Np个齿的活塞，并且其被布置在具有轴线DELTA c的铁磁齿环内，并且固定到 所述齿环设置有径向放置的NB电绕组，其中所述比Np / NB等于所述比率Sp / Sc，并且其中所述齿环的NB电绕组被依次供电。
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公开(公告)号：US20070153978A1
公开(公告)日：2007-07-05
申请号：US11618315
申请日：2006-12-29
申请人： Roland Bernard , Benoit Barthod
发明人： Roland Bernard , Benoit Barthod
IPC分类号： H01J35/00
CPC分类号： F04D19/042 , H01J35/103 , H01J35/106 , H01J35/14 , H01J35/20 , H01J35/26
摘要： A device in accordance with the invention for the emission of X-rays, comprises a vacuum pump the sealed peripheral casing whereof contains a cathode for emitting a flux of electrons, a rotary anode mounted at the end of the shaft of the vacuum pump and a collection device for collecting an emitted electron beam. This considerably reduces the overall size of the X-ray source and, thanks to the very fast and stable rotation of the rotary anode attached to the rotor of the vacuum pump, a source of very great brightness is produced. The rotary anode may be moved axially to compensate the wear that it suffers through the impact of the incident electron beam coming from the cathode. According to the invention the device further comprises at least one cooling element fixed to the vacuum pump stator or to the sealed peripheral casing opposite one of the main radial faces of the rotary anode to absorb radiated heat energy emitted by the rotary anode in operation.
摘要翻译： 根据本发明的用于发射X射线的装置包括真空泵，密封的外围壳体包含用于发射电子束的阴极，安装在真空泵的轴的端部的旋转阳极和 用于收集发射的电子束的收集装置。 这大大降低了X射线源的整体尺寸，并且由于连接到真空泵的转子的旋转阳极的非常快速和稳定的旋转，产生了非常大的亮度的源。 旋转阳极可以轴向移动以补偿其受到来自阴极的入射电子束的冲击所产生的磨损。 根据本发明，该装置还包括至少一个冷却元件，其固定到真空泵定子或与旋转阳极的主径向面之一相对的密封外围壳体，以吸收由操作中的旋转阳极发出的辐射热能。
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公开(公告)号：US07095038B2
公开(公告)日：2006-08-22
申请号：US10946109
申请日：2004-09-22
申请人： Benoit Barthod , Jean-Luc Rival , Matthieu Morpain
发明人： Benoit Barthod , Jean-Luc Rival , Matthieu Morpain
IPC分类号： H01J49/00
摘要： The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II—II) extending transversely relative to an optical axis (I—I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I—I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2 in the transmission chamber (2) that is well below the pressure P1 in the irradiation chamber (1). The low pressure in the transmission chamber (2) ensures that the EUV radiation is transmitted with little attenuation to a zone of use, without requiring voluminous high speed pumps (11, 12).
摘要翻译： 本发明的EUV辐射源包括含有照射区域（3）的照射室（1），其中产生辐射发生器材料流，例如沿着横向相对延伸的方向（II-II）传播的氙气流 到光轴（II）。 照射区域（3）处于与光轴（I-I）相对的隔膜（4）附近，并且使照射室（1）与透射室（2）连通。 功率激光束（5,6）在照射区域（3）中撞击辐射发生器材料流，并产生通过隔膜（4）传播的EUV辐射，并通过椭圆镜（2）调节在传输室（2） 13）。 差压泵（11,12）保持传动室（2）中的压力P 2远低于照射室（1）中的压力P 1。 传输室（2）中的低压力确保了EUV辐射以很少的衰减传播到使用区域，而不需要大容量的高速泵（11,12）。
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公开(公告)号：US5439357A
公开(公告)日：1995-08-08
申请号：US190983
申请日：1994-02-03
CPC分类号： F04C2/10 , F04C15/008 , F04C2/22
摘要： A positive-displacement machine comprising a piston situated in a casing. The outline of the piston is hypertrochoidal, as is the outline of the hollow inside volume of the casing. The piston has n axes of symmetry, and the casing has n+1 axes of symmetry. The piston rotates inside the casing in orbital motion about the axis .DELTA.c of the casing. To obtain the rotation in orbital motion, firstly the piston is freely rotatably mounted on a crank pin that has its axis offset relative to the axis of a supporting shaft that is coaxial with the axis .DELTA.c of the casing, the shaft being rotated, and secondly the surface of the piston and the surface of the hollow inside volume of the casing are equipped with permanent magnets creating magnetic repulsion forces.
摘要翻译： 一种正排量机器，其包括位于壳体中的活塞。 活塞的轮廓是高度瓣膜，外壳的空心内部体积的轮廓也是如此。 活塞具有n个对称轴，壳体具有n + 1个对称轴。 活塞围绕壳体的轴线DELTA c以轨道运动在壳体内旋转。 为了获得轨道运动中的旋转，首先，活塞可自由旋转地安装在曲柄销上，该曲柄销的轴线相对于与壳体的轴线DELTA c同轴，轴旋转的支撑轴的轴线偏移，并且 其次，活塞的表面和壳体的中空内部体积的表面配备有产生磁力排斥力的永磁体。
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