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公开(公告)号:US4471716A
公开(公告)日:1984-09-18
申请号:US409841
申请日:1982-08-20
申请人: Guy L. Milliren
发明人: Guy L. Milliren
IPC分类号: H01L21/673 , B05C13/02
CPC分类号: H01L21/6733 , Y10S134/902 , Y10S206/833
摘要: A PFA Teflon carrier for silicon wafers being processed in hot baths in the production of integrated circuit chips with sidewalls having wafer spacing webs and grooves receiving the wafers in confronting and spaced relation. The sidewalls having outboard channel supports or stiffening bars extending substantially to the ends of the sidewalls and adjacent offsets in the sidewalls which connect to the end walls of the receptacle, one end wall being H-shaped and having a cross bar panel with elongate parallel stiffener bars thereon at the level of the bottom edge of the wafer confining panels in the sidewalls, the stiffener bars in the end walls having their ends spaced from the sidewalls.
摘要翻译: 用于硅晶片的PFA特氟隆载体在热浴中加工,以生产集成电路芯片,其侧壁具有晶片间隔腹板和以相对和间隔的关系接收晶片的凹槽。 侧壁具有外侧通道支撑件或加强杆,其基本上延伸到侧壁的端部和连接到容器的端壁的侧壁中的相邻偏移,一个端壁是H形并且具有带有细长平行的加强件的横杆面板 在侧壁上的晶片限制板的底部边缘的水平面上的杆,其端壁中的加强筋的端部与侧壁间隔开。
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公开(公告)号:US4185807A
公开(公告)日:1980-01-29
申请号:US890611
申请日:1978-03-20
申请人: Guy L. Milliren
发明人: Guy L. Milliren
摘要: An all-plastic valve including a molded plastic housing, a molded plastic retaining nut, and a molded plastic valve stem.
摘要翻译: 全塑料阀,包括模制塑料外壳,模制塑料保持螺母和模制塑料阀杆。
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