公开(公告)号：US5109264A

公开(公告)日：1992-04-28

申请号：US554406

申请日：1990-07-19

申请人： Mituo Ohdate

发明人： Mituo Ohdate

IPC分类号： H01L21/22 ,  C30B25/12 ,  C30B31/14 ,  H01L21/673

CPC分类号： H01L21/67313 ,  C30B25/12 ,  C30B31/14 ,  Y10S206/833 ,  Y10S414/141 ,  Y10T29/41 ,  Y10T29/413

摘要： A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer hanger holding the wafers is put into a furnace for heat treatment of the wafers. Since the wafers are hung from the rod member, plastic deformation due to the gravity of the wafers is not caused in the wafers.

公开(公告)号：US5033406A

公开(公告)日：1991-07-23

申请号：US340487

申请日：1989-04-19

申请人： Steven N. Lee

发明人： Steven N. Lee

IPC分类号： B05C13/00 ,  H01L21/673

CPC分类号： H01L21/68707 ,  B05C13/00 ,  H01L21/67313 ,  Y10S206/833

摘要： A side lifting boat and a tool assembly is disclosed. The tool is detachably engageable to selectively lift a boat. Both boat and tool are anti-rotationally engageable by the tool's upper and lower projections at its forward end fitting into a correspondingly shaped space defined between the outer (non-wafer-carrying) surface on the side of the boat. The boat's corresponding space permits the lifting tool to be moved into the space and into position between two fulcrum points that stabilize the boat/tool assembly from anything other than a small relative angular rotation.

摘要翻译： 公开了侧升降船和工具组件。 该工具可拆卸地接合以选择性地提升船。 船舶和工具都可以通过工具的上端和下端突起在其前端处可旋转地接合，装配在限定在船侧的外（非晶片承载）表面之间的相应形状的空间中。 船的对应空间允许提升工具移动到空间中并且进入位于两个支点之间的位置，这两个支点将船/工具组件从除了小的相对角度旋转以外的任何一个稳定。

公开(公告)号：US4515104A

公开(公告)日：1985-05-07

申请号：US494171

申请日：1983-05-13

申请人： Steven N. Lee

发明人： Steven N. Lee

IPC分类号： B05C13/02 ,  C30B25/12 ,  C30B31/14 ,  H01L21/673

CPC分类号： H01L21/67313 ,  B05C13/02 ,  C30B25/12 ,  C30B31/14 ,  Y10S206/833

摘要： A quartz boat is formed with a plurality of spaced, parallel rods having slots for supporting a series of semi-conductor wafers in a generally edgewise, spaced, parallel position. The slots continue to the ends of the rods, and the cross members supporting the rods are spaced inwardly from the rod ends, such that a series of boats may be arranged with the rods in end-to-end relation and the wafer space between adjacent boats is the same as the wafer space in the middle of a boat. The boat is also provided with a pair of tubes parallel to the rods for receiving a pickup fork.

摘要翻译： 石英舟形成有多个间隔开的平行杆，其具有用于以大致沿边缘间隔开的平行位置支撑一系列半导体晶片的槽。 狭槽继续到杆的端部，并且支撑杆的横向构件与杆端部向内间隔开，使得一系列的船可以布置成使杆处于端对端关系，并且晶片间隔在相邻的 船只与船中间的晶圆空间相同。 船还设有一对平行于杆的管子，用于接收拾取叉。

公开(公告)号：US3486631A

公开(公告)日：1969-12-30

申请号：US3486631D

申请日：1967-09-29

申请人： JOHN T SHALER CO

发明人： RODMAN HUGH

IPC分类号： H01L21/673 ,  A47G19/08

CPC分类号： H01L21/67326 ,  Y10S206/833

公开(公告)号：US20050006325A1

公开(公告)日：2005-01-13

申请号：US10615743

申请日：2003-07-09

申请人： Tong Hua ,  Chia Hong ,  Zhang Jian ,  Tan Yong

发明人： Tong Hua ,  Chia Hong ,  Zhang Jian ,  Tan Yong

IPC分类号： H01L21/673 ,  A47G19/08

CPC分类号： H01L21/6732 ,  H01L21/67326 ,  Y10S206/833

摘要： A substrate cassette having a conventional form, an open container having an upper entrance and a narrow lower opening formed by two side panels and two end panels. A preferred embodiment includes a train of substrate alignment channels on the inner surfaces of the two side panels, each channel is U shaped and having planar surface with a left surface, a right surface, and a bottom surface. An arcuate curbing member disposed on a left surface in each of the substrate alignment channels. The arcuate curbing member includes a top end with a thinner sloped profile facing the upper open entrance of the cassette allowing a substrate to slide through and under a stepped lower end.

摘要翻译： 具有常规形式的基板盒，具有由两个侧板和两个端板形成的上入口和窄下开口的敞开的容器。 优选实施例包括在两个侧板的内表面上的一列衬底对准通道，每个通道为U形并且具有具有左表面，右表面和底表面的平面表面。 设置在每个基板对准通道中的左表面上的弓形遏制构件。 弧形遏制构件包括顶部，其具有面向盒的上部开放入口的较薄的倾斜轮廓，允许基底在阶梯状下端下方滑动。

公开(公告)号：US5931662A

公开(公告)日：1999-08-03

申请号：US29398

申请日：1998-03-12

申请人： Naoshi Adachi ,  Takehiro Hisatomi ,  Masakazu Sano

发明人： Naoshi Adachi ,  Takehiro Hisatomi ,  Masakazu Sano

IPC分类号： H01L21/322 ,  H01L21/324 ,  H01L21/673 ,  F27D3/12 ,  B05C13/00 ,  B65D85/48

CPC分类号： H01L21/67303 ,  H01L21/3225 ,  H01L21/324 ,  H01L21/67309 ,  Y10S206/832 ,  Y10S206/833 ,  Y10T117/1016

摘要： The present invention is designed to provide an annealing method for silicon single crystal wafers, which makes it possible to increase the number of silicon single crystal wafers processed during a single annealing process under a variety of annealing performed on silicon single crystal wafers, such as oxygen outer diffusion annealing for forming a DZ layer, annealing that generates and controls BMD for providing IG functions, and annealing that endeavors to improve and enhance GOI characteristics by eliminating wafer surface layer COP, and internal grown-in defects, and also enables the suppression of dislocation and slip in elevated temperature annealing environments. It calls for annealing to be performed by stacking up around 10 wafers, treating this group as a unit, placing this group, either horizontally or slightly inclined at an angle of roughly 0.5.about.5.degree., into a boat, which makes contact with and supports the periphery of the wafers at a plurality of locations, and then stacking up a plurality of these groups of wafers into numerous stacks inside the boat. As indicated in the embodiments, this method enables a variety of annealing to be applied to silicon single crystal wafers, making it possible to prevent dislocation and slip, and to provide the same annealing effect uniformly to all wafers.

摘要翻译： PCT No.PCT / JP97 / 02232 Sec。 371日期1998年3月12日 102（e）1998年3月12日PCT PCT 1997年6月27日PCT公布。 公开号WO98 / 00860 日本1998年1月8日本发明旨在提供一种用于硅单晶晶片的退火方法，其可以增加在单个退火工艺中在单晶退火过程中处理的硅单晶晶片的数量， 例如用于形成DZ层的氧外扩散退火，用于产生和控制用于提供IG功能的BMD的退火，以及通过消除晶片表面层COP和内部生长缺陷来改善和增强GOI特性的退火，以及 还能够在高温退火环境中抑制位错和滑移。 它要求通过堆叠约10片晶片进行退火，将该组作为一个单元进行处理，将该组以水平或略微倾斜约0.5度差5度的角度放入到与之接触并支撑的船上 在多个位置处的晶片的周边，然后将多个这些晶片组堆叠成船内的许多堆叠。 如实施例所示，该方法能够将各种退火应用于硅单晶晶片，使得可以防止位错和滑动，并且对所有晶片均匀地提供相同的退火效果。

公开(公告)号：US4966549A

公开(公告)日：1990-10-30

申请号：US424826

申请日：1989-10-20

申请人： Mituo Ohdate

发明人： Mituo Ohdate

IPC分类号： H01L21/22 ,  C30B25/12 ,  C30B31/14 ,  H01L21/673

CPC分类号： H01L21/67313 ,  C30B25/12 ,  C30B31/14 ,  Y10S206/833 ,  Y10S414/141 ,  Y10T29/41 ,  Y10T29/413

摘要： A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer hanger holding the wafers is put into a furnace for heat treatment of the wafers. Since the wafers are hung from the rod member, plastic deformation due to the gravity of the wafers is not caused in the wafers.

摘要翻译： 晶片挂架具有杆构件和支撑构件。 将杆构件插入到形成在半导体晶片中的相应凹口中，然后放置在支撑构件上。 保持晶片的晶片挂架放入用于晶片热处理的炉中。 由于晶片悬挂在杆构件上，因晶片的重力而引起的塑性变形不会在晶片中引起。

公开(公告)号：US4653650A

公开(公告)日：1987-03-31

申请号：US790326

申请日：1985-10-23

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： B65D85/38 ,  F27D5/00 ,  H01L21/67 ,  H01L21/673 ,  A47G19/08

CPC分类号： F27D5/0012 ,  Y10S206/833

摘要： A rack for supporting wafers has a pair of parallel struts with kerfs therealong for supporting the wafers. A dummy wafer is attached to the struts near each end of the struts to connect the struts structurally as the rack and serve as rack-handling handles. The dummy wafers are parallel to the adjacent kerfs and thus the wafers therein and dimensioned similarly to the wafers for providing favorable gas and heat distribution when a wafer loaded rack is placed in a furnace. This adapts the rack for diffusion treatment of semiconductor wafers.

摘要翻译： 用于支撑晶片的支架具有一对具有用于支撑晶片的切口的平行支柱。 将假晶片附接到支柱每个支柱附近的支柱，以将支柱结构地连接到支架上并用作支架处理手柄。 虚拟晶片平行于相邻的切口，因此平行于其中的晶片，并且其尺寸类似于晶片，以便当晶片加载的机架放置在炉中时提供有利的气体和热分布。 这适应了机架用于半导体晶片的扩散处理。

公开(公告)号：US4461386A

公开(公告)日：1984-07-24

申请号：US263123

申请日：1981-05-13

申请人： Robert L. Turner ,  Robert E. Jennings

发明人： Robert L. Turner ,  Robert E. Jennings

IPC分类号： G11B33/04 ,  A47G29/00

CPC分类号： G11B33/0472 ,  Y10S206/833

摘要： A rack for use in carrying recorded discs through a cleaning operation includes a substantially C-shaped rod having a hook at its top end and three sets of spaced posts extending from the sides of a circular bottom portion. A separate plastic spindle is mounted on each of the posts with each spindle having a plurality of spaced annular grooves in its outer surface. The recorded discs are adapted to be set in the grooves in the spindles to support the discs on the rack.

摘要翻译： 用于通过清洁操作携带记录盘的支架包括：在其顶端具有钩的基本为C形的杆，以及从圆形底部的侧面延伸的三组隔开的柱。 在每个支柱上安装有单独的塑料主轴，每个主轴在其外表面上具有多个间隔开的环形槽。 记录的盘适于设置在主轴的凹槽中以支撑机架上的盘。

公开(公告)号：US3988333A

公开(公告)日：1976-10-26

申请号：US527415

申请日：1974-11-26

申请人： Yasushi Suzuki ,  Toshihisa Itaya

发明人： Yasushi Suzuki ,  Toshihisa Itaya

IPC分类号： C07D499/00 ,  C07F5/06

CPC分类号： C07D499/00 ,  C07F5/069 ,  Y10S206/832 ,  Y10S206/833

摘要： A process for the preparation of di- or tri-substituted aluminum salts of carboxyl group-containing, pharmaceutically effective compounds which comprises reacting up to three types of carboxyl group-containing, pharmaceutically effective compounds with an organic aluminum compound expressed by the following formula; ##EQU1## wherein R.sub.1 and R.sub.2, which may be the same or different, stand for an aliphatic, alicyclic or aromatic hydrocarbon residue having up to 10 carbon atoms, and R.sub.3 stands for a hydrocarbon residue as defined with respect to R.sub.1 and R.sub.2, which may be the same as, or different from, R.sub.1 and R.sub.2, or a hydrocarbyloxy group of the formula OR.sub.4 in which R.sub.4 is an aliphatic, alicyclic or aromatic hydrocarbon residue having up to 10 carbon atoms,and a novel di- or tri-substituted aluminum salts of carboxyl group-containing, pharmaceutically effective compounds.

摘要翻译： 一种制备含羧基的二取代或三取代的铝盐的药学上有效的化合物的方法，其包括使最多三种含羧基的药学上有效的化合物与由下式表示的有机铝化合物反应; R1 ANGLE Al-R3R2其中R1和R2可以相同或不同，代表具有至多10个碳原子的脂族，脂环族或芳族烃残基，R3代表如R1和 R2可以与R 1和R 2相同或不同，或者式OR4的烃氧基，其中R 4是具有至多10个碳原子的脂族，脂环族或芳族烃残基，并且新的二价 含有羧基的三取代铝盐，药用有效化合物。