MEASURING DEVICE
    1.
    发明公开
    MEASURING DEVICE 审中-公开

    公开(公告)号:US20240175825A1

    公开(公告)日:2024-05-30

    申请号:US18285292

    申请日:2022-02-18

    CPC classification number: G01N21/9501 G01N21/6489

    Abstract: A measuring device includes: an excitation light source; an integrating sphere; an excitation optical system; a light detector; and a first detection optical system, wherein the first detection optical system has an opening portion, the excitation optical system and the first detection optical system have a separation optical element, a first converging element, and a second converging element, wherein the optical axis of the excitation light incident on the subject to be measured and the optical axis of the light to be measured emitted from the integrating sphere obliquely intersect with each other by means of the separation optical element and the first converging element, and wherein an irradiation spot and the opening portion are in an optically conjugate relationship by means of the first converging element and the second converging element.

    SPECTROMETRY DEVICE AND SPECTROMETRY METHOD
    2.
    发明申请

    公开(公告)号:US20200096389A1

    公开(公告)日:2020-03-26

    申请号:US16612469

    申请日:2018-04-02

    Abstract: A spectrometry device includes: an integrating sphere which includes an inner wall surface and an attachment hole; an adapter which includes a guide hole guiding the measurement target light and is disposed in the integrating sphere; a plate which includes a first surface covering the guide hole from the outside of the integrating sphere and allowing a sample to be mounted thereon and a second surface and through which the measurement target light is transmitted; a holder which includes a concave portion mounting the plate thereon and is attached to the attachment hole; and a spectral detector configured to detect the measurement target light. The concave portion includes a bottom surface facing the second surface and a side surface surrounding the periphery of the plate. The bottom surface and the side surface are coated with a reflective material reflecting the measurement target light.

    SOLID IMMERSION LENS UNIT AND SEMICONDUCTOR DETECTOR DEVICE

    公开(公告)号:US20190391379A1

    公开(公告)日:2019-12-26

    申请号:US16469267

    申请日:2017-11-21

    Abstract: The solid immersion lens unit includes: a solid immersion lens having a contact surface allowed to be in contact with an inspection object and a spherical surface allowed to be opposite to an objective lens; a holder holding the solid immersion lens; a magnet provided to the holder; and a spherical body rotatably held by a magnetic force of the magnet at a position opposite to the spherical surface. The holder swingably holds the solid immersion lens in a state where the spherical surface is in contact with the spherical body.

    MEASURING DEVICE
    4.
    发明公开
    MEASURING DEVICE 审中-公开

    公开(公告)号:US20240183795A1

    公开(公告)日:2024-06-06

    申请号:US18285281

    申请日:2022-02-18

    CPC classification number: G01N21/9505 G01N2201/065

    Abstract: A measuring device includes: an integrating sphere; an excitation optical system; a light detector; and a first detection optical system. The optical axis of the excitation light incident on the subject to be measured in the integrating sphere in the excitation optical system and the optical axis of the light to be measured that is emitted from the integrating sphere in the first detection optical system obliquely intersect with each other, the first detection optical system has an opening portion that limits a detection range of the light to be measured in the light detector, and an irradiation spot of the excitation light on the subject to be measured and the opening portion are in an optically conjugate relationship.

    COOLING UNIT, OBJECTIVE LENS MODULE, AND SEMICONDUCTOR INSPECTION APPARATUS

    公开(公告)号:US20250155339A1

    公开(公告)日:2025-05-15

    申请号:US18840598

    申请日:2022-11-18

    Inventor: Akihiro NAKAMURA

    Abstract: A cooling unit includes a jacket, and the jacket includes a central portion and an outer portion. An opening through which light from a semiconductor device passes is formed in the central portion. The outer portion includes a contact portion that comes into contact with a stage on which the semiconductor device is disposed. A supply flow passage through which a cooling fluid for cooling the semiconductor device flows is formed in the jacket. A groove configured so that the cooling fluid flows down from an upper surface of the central portion is formed between the central portion and the outer portion in the jacket. A discharge flow passage through which the cooling fluid to be discharged to the outside flows is connected to the groove.

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